Mahieu, S.; Ghekiere, P.; de Winter, G.; de Gryse, R.; Depla, D.; Van Tendeloo, G.; Lebedev, O.I. |
Biaxially aligned titanium nitride thin films deposited by reactive unbalanced magnetron sputtering |
2006 |
Surface and coatings technology |
200 |
36 |
UA library record; WoS full record; WoS citing articles |