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Author
Title
Year
Publication
Volume
Times cited
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Hens, S.
;
van Landuyt, J.
;
Bender, H.
;
Boullart, W.
;
Vanhaelemeersch, S.
Chemical and structural analysis of etching residue layers in semiconductor devices with energy filtering transmission electron microscopy
2001
Materials science in semiconductor processing
4
UA library record
;
WoS full record
