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“Biaxially aligned titanium nitride thin films deposited by reactive unbalanced magnetron sputtering”. Mahieu S, Ghekiere P, de Winter G, de Gryse R, Depla D, Van Tendeloo G, Lebedev OI, Surface and coatings technology 200, 2764 (2006). http://doi.org/10.1016/j.surfcoat.2004.09.012 |