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Author Geuens, I.; Gijbels, R.; Jacob, W.; Verbeeck, A.; de Keyzer, R.
Title The chemical characterization of silver halide microcrystals Type P3 Proceeding
Year 1993 Publication (up) Abbreviated Journal
Volume Issue Pages 251-253
Keywords P3 Proceeding; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author Thesis
Publisher The Society for Imaging Science and Technology Place of Publication Springfield, Va Editor
Language Wos Publication Date 0000-00-00
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN ISBN Additional Links UA library record
Impact Factor Times cited Open Access
Notes Approved no
Call Number UA @ lucian @ c:irua:6167 Serial 347
Permanent link to this record
 

 
Author Van Tendeloo, G.; Amelinckx, S.
Title Electron microscopy of C60 and C70 fullerites Type H3 Book chapter
Year 1993 Publication (up) Abbreviated Journal
Volume Issue Pages 182-227
Keywords H3 Book chapter; Electron microscopy for materials research (EMAT)
Abstract
Address
Corporate Author Thesis
Publisher Springer Place of Publication Berlin Editor
Language Wos Publication Date 0000-00-00
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN ISBN Additional Links UA library record
Impact Factor Times cited Open Access
Notes Approved no
Call Number UA @ lucian @ c:irua:7507 Serial 965
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Author van Straaten, M.; Gijbels, R.
Title Fundamental aspects of an analytical glow discharge Type H3 Book chapter
Year 1993 Publication (up) Abbreviated Journal
Volume Issue Pages 130-139
Keywords H3 Book chapter; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author Thesis
Publisher Royal Society of Chemistry Place of Publication Cambridge Editor
Language Wos A1993BY94U00015 Publication Date 0000-00-00
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN ISBN Additional Links UA library record; WoS full record;
Impact Factor Times cited Open Access
Notes Approved CHEMISTRY, PHYSICAL 77/144 Q3 # MATHEMATICS, INTERDISCIPLINARY 19/101 Q1 # PHYSICS, ATOMIC, MOLECULAR & CHEMICAL 17/35 Q2 #
Call Number UA @ lucian @ c:irua:6166 Serial 1309
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Author Vertes, A.; Gijbels, R.; Adams, F.
Title Introduction Type H3 Book chapter
Year 1993 Publication (up) Abbreviated Journal
Volume Issue Pages 1-6
Keywords H3 Book chapter; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author Thesis
Publisher Wiley Place of Publication New York Editor
Language Wos Publication Date 0000-00-00
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN ISBN Additional Links UA library record
Impact Factor Times cited Open Access
Notes Approved no
Call Number UA @ lucian @ c:irua:6122 Serial 1720
Permanent link to this record
 

 
Author Vertes, A.; Gijbels, R.; Adams, F.
Title Laser ionization mass analysis Type ME1 Book as editor or co-editor
Year 1993 Publication (up) Abbreviated Journal
Volume Issue Pages
Keywords ME1 Book as editor or co-editor; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author Thesis
Publisher Wiley Place of Publication New York Editor
Language Wos Publication Date 0000-00-00
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN ISBN 0-471-53673-3 Additional Links UA library record
Impact Factor Times cited Open Access
Notes Approved INSTRUMENTS & INSTRUMENTATION 31/56 Q3 # NUCLEAR SCIENCE & TECHNOLOGY 9/32 Q2 # PHYSICS, PARTICLES & FIELDS 24/28 Q4 # SPECTROSCOPY 28/43 Q3 #
Call Number UA @ lucian @ c:irua:6121 Serial 1789
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Author Struyf, H.; van Roy, W.; van Vaeck, L.; Gijbels, R.; Caravatti, P.
Title Laser microprobe Fourier transform mass spectrometer with external ion source for organic and inorganic microanalysis Type H3 Book chapter
Year 1993 Publication (up) Abbreviated Journal
Volume Issue Pages 595-596
Keywords H3 Book chapter; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author Thesis
Publisher San Francisco Press Place of Publication San Francisco, Calif. Editor
Language Wos Publication Date 0000-00-00
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN ISBN Additional Links UA library record
Impact Factor Times cited Open Access
Notes Approved no
Call Number UA @ lucian @ c:irua:6272 Serial 1792
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Author van Vaeck, L.; van Roy, W.; Gijbels, R.; Adams, F.
Title Lasers in mass spectrometry: organic and inorganic instrumentation Type H3 Book chapter
Year 1993 Publication (up) Abbreviated Journal
Volume Issue Pages 7-126
Keywords H3 Book chapter; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author Thesis
Publisher Wiley Place of Publication New York Editor
Language Wos Publication Date 0000-00-00
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN ISBN Additional Links UA library record
Impact Factor Times cited Open Access
Notes Approved no
Call Number UA @ lucian @ c:irua:6123 Serial 1799
Permanent link to this record
 

 
Author Peeters, F.M.; Shi, J.M.; Devreese, J.T.
Title Magneto-optics of shallow impurities in superlattices Type H1 Book chapter
Year 1993 Publication (up) Abbreviated Journal
Volume Issue Pages 221-237
Keywords H1 Book chapter; Condensed Matter Theory (CMT); Theory of quantum systems and complex systems
Abstract
Address
Corporate Author Thesis
Publisher Kluwer Place of Publication Dordrecht Editor
Language Wos A1993BA34C00020 Publication Date 0000-00-00
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN ISBN Additional Links UA library record; WoS full record; WoS citing articles
Impact Factor Times cited 3 Open Access
Notes Approved no
Call Number UA @ lucian @ c:irua:5789 Serial 1904
Permanent link to this record
 

 
Author Devreese, J.T.; Shi, J.M.; Peeters, F.M.
Title Magneto-polaron effect on shallow donors in 3D en Q2S systems Type H3 Book chapter
Year 1993 Publication (up) Abbreviated Journal
Volume Issue Pages 173-184
Keywords H3 Book chapter; Condensed Matter Theory (CMT); Theory of quantum systems and complex systems
Abstract
Address
Corporate Author Thesis
Publisher Kluwer Place of Publication Dordrecht Editor
Language Wos Publication Date 0000-00-00
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN ISBN Additional Links UA library record
Impact Factor Times cited Open Access
Notes Approved no
Call Number UA @ lucian @ c:irua:20360 Serial 1908
Permanent link to this record
 

 
Author van Landuyt, J.; Kuypers, S.; van Heurck, C.; Van Tendeloo, G.; Amelinckx, S.
Title Methods of structural analysis of modulated structures and quasicrystals Type H3 Book chapter
Year 1993 Publication (up) Abbreviated Journal
Volume Issue Pages 205-224
Keywords H3 Book chapter; Electron microscopy for materials research (EMAT)
Abstract
Address
Corporate Author Thesis
Publisher Place of Publication s.l. Editor
Language Wos Publication Date 0000-00-00
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN ISBN Additional Links UA library record
Impact Factor Times cited Open Access
Notes Approved no
Call Number UA @ lucian @ c:irua:6781 Serial 2018
Permanent link to this record
 

 
Author Vertes, A.; Gijbels, R.
Title Methods using low and medium laser irradiance: laser-induced thermal desorption and matrix-assisted methods Type H3 Book chapter
Year 1993 Publication (up) Abbreviated Journal
Volume Issue Pages 127-175
Keywords H3 Book chapter; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author Thesis
Publisher Wiley Place of Publication New York Editor
Language Wos Publication Date 0000-00-00
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN ISBN Additional Links UA library record
Impact Factor Times cited Open Access
Notes Approved no
Call Number UA @ lucian @ c:irua:7325 Serial 2019
Permanent link to this record
 

 
Author Hai, G.Q.; Peeters, F.M.; Devreese, J.T.
Title Polaron cyclotron resonance spectrum with interface optical phonon modes in GaAs/AlAs quantum wells Type H3 Book chapter
Year 1993 Publication (up) Abbreviated Journal
Volume Issue Pages 243-252
Keywords H3 Book chapter; Condensed Matter Theory (CMT); Theory of quantum systems and complex systems
Abstract
Address
Corporate Author Thesis
Publisher Kluwer Place of Publication Dordrecht Editor
Language Wos A1993BY55J00024 Publication Date 0000-00-00
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN ISBN Additional Links UA library record; WoS full record;
Impact Factor Times cited Open Access
Notes Approved
Call Number UA @ lucian @ c:irua:5743 Serial 2664
Permanent link to this record
 

 
Author van Vaeck, L.; van Roy, W.; Gijbels, R.; Adams, F.
Title Structural characterization of organic molecules by laser mass spectrometry Type H3 Book chapter
Year 1993 Publication (up) Abbreviated Journal
Volume Issue Pages 177-319
Keywords H3 Book chapter; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author Thesis
Publisher Wiley Place of Publication New York Editor
Language Wos Publication Date 0000-00-00
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN ISBN Additional Links UA library record
Impact Factor Times cited Open Access
Notes Approved
Call Number UA @ lucian @ c:irua:6124 Serial 3222
Permanent link to this record
 

 
Author Adams, F.; Gijbels, R.; Van Grieken, R.; Dachang, Z.
Title Inorganic mass spectrometry Type MA3 Book as author
Year 1993 Publication (up) Abbreviated Journal
Volume Issue Pages 391 p.
Keywords MA3 Book as author; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT); AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
Abstract
Address
Corporate Author Thesis
Publisher Fudan University Press Place of Publication Shanghai Editor
Language Wos Publication Date
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN ISBN Additional Links UA library record
Impact Factor Times cited Open Access
Notes Approved no
Call Number UA @ lucian @ c:irua:34086 Serial 4522
Permanent link to this record
 

 
Author Xhoffer, C.; Van Grieken, R.
Title Environmental aerosol characterization by single particle analysis techniques Type H3 Book chapter
Year 1993 Publication (up) Abbreviated Journal
Volume Issue Pages 207-245 T2 - Environmental particles; 2 / Buffle,
Keywords H3 Book chapter; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
Abstract
Address
Corporate Author Thesis
Publisher Place of Publication Editor
Language Wos Publication Date
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN ISBN Additional Links UA library record
Impact Factor Times cited Open Access
Notes Approved no
Call Number UA @ admin @ c:irua:6267 Serial 7926
Permanent link to this record
 

 
Author van Malderen, H.; de Bock, L.; Injuk, J.; Xhoffer, C.; Van Grieken, R.
Title North Sea aerosol characterization by single particle analysis techniques Type H3 Book chapter
Year 1993 Publication (up) Abbreviated Journal
Volume Issue Pages 119-135 T2 - Progress in Belgian oceanographic res
Keywords H3 Book chapter; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
Abstract
Address
Corporate Author Thesis
Publisher Place of Publication Editor
Language Wos Publication Date
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN ISBN Additional Links UA library record
Impact Factor Times cited Open Access
Notes Approved no
Call Number UA @ admin @ c:irua:6269 Serial 8317
Permanent link to this record
 

 
Author Török, S.; Szandor, S.; Xhoffer, C.; Van Grieken, R.
Title Source apportionment of individual aerosol particles at Hungarian background stations Type H3 Book chapter
Year 1993 Publication (up) Abbreviated Journal
Volume Issue Pages 32-331 T2 - Photo-oxidants: precursors and product
Keywords H3 Book chapter; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
Abstract
Address
Corporate Author Thesis
Publisher Place of Publication Editor
Language Wos Publication Date
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN ISBN Additional Links UA library record
Impact Factor Times cited Open Access
Notes Approved no
Call Number UA @ admin @ c:irua:6265 Serial 8559
Permanent link to this record
 

 
Author Injuk, J.; van Malderen, H.; Van Grieken, R.
Title Study of the heavy metal concentration, deposition and sources of the North Sea aerosols using X-ray emission techniques Type H3 Book chapter
Year 1993 Publication (up) Abbreviated Journal
Volume Issue Pages 793-795 T2 - Photo-oxidants: precursors and produc
Keywords H3 Book chapter; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
Abstract
Address
Corporate Author Thesis
Publisher Place of Publication Editor
Language Wos Publication Date
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN ISBN Additional Links UA library record
Impact Factor Times cited Open Access
Notes Approved no
Call Number UA @ admin @ c:irua:6266 Serial 8605
Permanent link to this record
 

 
Author Van Tendeloo, G.; Amelinckx, S.; van Landuyt, J.
Title Graphene textures: tubules and whiskers related to fullerene crystallography Type A1 Journal article
Year 1993 Publication (up) Acta crystallographica: section A: foundations of crystallography Abbreviated Journal Acta Crystallogr A
Volume 49 Issue Pages 355
Keywords A1 Journal article; Electron microscopy for materials research (EMAT)
Abstract
Address
Corporate Author Thesis
Publisher Place of Publication Copenhagen Editor
Language Wos Publication Date 0000-00-00
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN 0108-7673 ISBN Additional Links UA library record
Impact Factor 2.307 Times cited Open Access
Notes Approved no
Call Number UA @ lucian @ c:irua:6842 Serial 1378
Permanent link to this record
 

 
Author Krekels, T.; Van Tendeloo, G.; Amelinckx, S.; van Landuyt, J.
Title Structural effects of element substitution in the CuO plane of the 1-2-3 YBCO superconductor Type A1 Journal article
Year 1993 Publication (up) Acta crystallographica: section A: foundations of crystallography Abbreviated Journal Acta Crystallogr A
Volume 49 Issue Pages 287
Keywords A1 Journal article; Electron microscopy for materials research (EMAT)
Abstract
Address
Corporate Author Thesis
Publisher Place of Publication Copenhagen Editor
Language Wos A1993KR35400006 Publication Date 0000-00-00
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN 0108-7673 ISBN Additional Links UA library record; WoS full record; WoS citing articles
Impact Factor 2.307 Times cited 56 Open Access
Notes Approved PHYSICS, APPLIED 28/145 Q1 #
Call Number UA @ lucian @ c:irua:6840 Serial 3233
Permanent link to this record
 

 
Author Milat, O.; Van Tendeloo, G.; van Landuyt, J.; Amelinckx, S.
Title Superlattice variants in Sr2CuO2(CO3): an electron microscopy study Type A1 Journal article
Year 1993 Publication (up) Acta crystallographica: section A: foundations of crystallography Abbreviated Journal Acta Crystallogr A
Volume 49 Issue Pages 357
Keywords A1 Journal article; Electron microscopy for materials research (EMAT)
Abstract
Address
Corporate Author Thesis
Publisher Place of Publication Copenhagen Editor
Language Wos Publication Date 0000-00-00
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN 0108-7673 ISBN Additional Links UA library record
Impact Factor 2.307 Times cited Open Access
Notes Approved PHYSICS, APPLIED 28/145 Q1 #
Call Number UA @ lucian @ c:irua:6841 Serial 3379
Permanent link to this record
 

 
Author Muto, S.; Schryvers, D.; Merk, N.; Tanner, L.E.
Title HREM and ED study of the displacive transformation of the Ni2Al phase in a Ni65Al35 alloy and associated with the martensitic transformation Type A1 Journal article
Year 1993 Publication (up) Acta metallurgica et materialia Abbreviated Journal
Volume 41 Issue Pages 2377-2383
Keywords A1 Journal article; Electron microscopy for materials research (EMAT)
Abstract
Address
Corporate Author Thesis
Publisher Place of Publication New York Editor
Language Wos A1993LN82900011 Publication Date 0000-00-00
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN 0956-7151 ISBN Additional Links UA library record; WoS full record; WoS citing articles
Impact Factor Times cited 31 Open Access
Notes Approved no
Call Number UA @ lucian @ c:irua:6778 Serial 1497
Permanent link to this record
 

 
Author Van Tendeloo, G.; Amelinckx, S.
Title Structural studies on superconducting materials and fullerites by electron microscopy Type A1 Journal article
Year 1993 Publication (up) Advanced materials Abbreviated Journal Adv Mater
Volume 5 Issue 9 Pages 620-629
Keywords A1 Journal article; Electron microscopy for materials research (EMAT)
Abstract
Address
Corporate Author Thesis
Publisher Place of Publication Weinheim Editor
Language Wos A1993LW20600003 Publication Date 2004-12-30
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN 0935-9648;1521-4095; ISBN Additional Links UA library record; WoS full record; WoS citing articles
Impact Factor 17.493 Times cited 2 Open Access
Notes Approved
Call Number UA @ lucian @ c:irua:6838 Serial 3262
Permanent link to this record
 

 
Author van Vaeck, L.; van Roy, W.; Gijbels, R.
Title Laser ionization mass spectrometry for the characterization of solid materials Type A1 Journal article
Year 1993 Publication (up) Analusis : chimie analytique, méthodes physiques d'analyse, composition de la matière Abbreviated Journal
Volume 21 Issue Pages 53-75
Keywords A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author Thesis
Publisher Place of Publication Paris Editor
Language Wos A1993KQ28400013 Publication Date 0000-00-00
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN 0365-4877 ISBN Additional Links UA library record; WoS full record; WoS citing articles
Impact Factor Times cited 10 Open Access
Notes Approved no
Call Number UA @ lucian @ c:irua:6170 Serial 1790
Permanent link to this record
 

 
Author Struyf, H.; van Roy, W.; van Vaeck, L.; van Grieken, R.; Gijbels, R.; Caravatti, P.
Title Laser microprobe Fourier transform mass spectrometer with external ion source for organic and inorganic microanalysis Type A1 Journal article
Year 1993 Publication (up) Analytica chimica acta Abbreviated Journal Anal Chim Acta
Volume 283 Issue Pages 139-151
Keywords A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT); AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
Abstract
Address
Corporate Author Thesis
Publisher Place of Publication Amsterdam Editor
Language Wos A1993MK02800013 Publication Date 2002-07-25
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN 0003-2670; ISBN Additional Links UA library record; WoS full record; WoS citing articles
Impact Factor 4.513 Times cited 17 Open Access
Notes Approved no
Call Number UA @ lucian @ c:irua:6141 Serial 1793
Permanent link to this record
 

 
Author Adams, F.; Adriaens, A.; Berghmans, P.; Janssens, K.
Title Surface microanalysis Type A1 Journal article
Year 1993 Publication (up) Analytica chimica acta Abbreviated Journal
Volume 283 Issue Pages 19-34
Keywords A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
Abstract
Address
Corporate Author Thesis
Publisher Place of Publication Editor
Language Wos A1993MK02800003 Publication Date 2002-07-25
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN 0003-2670 ISBN Additional Links UA library record; WoS full record; WoS citing articles
Impact Factor Times cited Open Access
Notes Approved no
Call Number UA @ admin @ c:irua:6106 Serial 5856
Permanent link to this record
 

 
Author Janssens, K.; Vincze, L.; Adams, F.; Jones, K.W.
Title Synchrotron radiation-induced X-ray microanalysis Type A1 Journal article
Year 1993 Publication (up) Analytica chimica acta Abbreviated Journal
Volume 283 Issue Pages 98-119
Keywords A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
Abstract
Address
Corporate Author Thesis
Publisher Place of Publication Editor
Language Wos A1993MK02800009 Publication Date 2002-07-25
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN 0003-2670 ISBN Additional Links UA library record; WoS full record; WoS citing articles
Impact Factor Times cited Open Access
Notes Approved no
Call Number UA @ admin @ c:irua:6107 Serial 5865
Permanent link to this record
 

 
Author Treiger, B.; van Malderen, H.; Bondarenko, I.; van Espen, P.; Van Grieken, R.
Title Studying aerosol samples by non-linear mapping of electron probe microanalysis data Type A1 Journal article
Year 1993 Publication (up) Analytica chimica acta Abbreviated Journal
Volume 284 Issue Pages 119-124
Keywords A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation); Chemometrics (Mitac 3)
Abstract
Address
Corporate Author Thesis
Publisher Place of Publication Editor
Language Wos A1993MR27600014 Publication Date 2002-07-25
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN 0003-2670; 1873-4324 ISBN Additional Links UA library record; WoS full record; WoS citing articles
Impact Factor Times cited Open Access
Notes Approved no
Call Number UA @ admin @ c:irua:6224 Serial 8610
Permanent link to this record
 

 
Author Vertes, A.; Irinyi, G.; Gijbels, R.
Title Hydrodynamic model of matrix-assisted laser desorption mass spectrometry Type A1 Journal article
Year 1993 Publication (up) Analytical chemistry Abbreviated Journal Anal Chem
Volume 65 Issue Pages 2389-2393
Keywords A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author Thesis
Publisher Place of Publication Washington, D.C. Editor
Language Wos A1993LU63400039 Publication Date 2007-05-30
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN 0003-2700;1520-6882; ISBN Additional Links UA library record; WoS full record; WoS citing articles
Impact Factor 5.636 Times cited 100 Open Access
Notes Approved CHEMISTRY, PHYSICAL 77/144 Q3 # MATHEMATICS, INTERDISCIPLINARY 19/101 Q1 # PHYSICS, ATOMIC, MOLECULAR & CHEMICAL 17/35 Q2 #
Call Number UA @ lucian @ c:irua:6161 Serial 1530
Permanent link to this record
 

 
Author Vanhellemont, J.; Maes, H.E.; Schaekers, M.; Armigliato, A.; Cerva, H.; Cullis, A.; de Sande, J.; Dinges, H.; Hallais, J.; Nayar, V.; Pickering, C.; Stehlé, J.L.; Van Landuyt, J.; Walker, C.; Werner, H.; Salieri, P.;
Title Round-robin investigation of silicon-oxide on silicon reference materials for ellipsometry Type A1 Journal article
Year 1993 Publication (up) Applied surface science T2 – SYMP ON DIAGNOSTIC TECHNIQUES FOR SEMICONDUCTOR MATERIALS ANALYSIS AND, FABRICATION PROCESS CONTROL, AT THE 1992 SPRING CONF OF THE EUROPEAN, MATERIALS RESEARCH SOC, JUN 02-05, 1992, STRASBOURG, FRANCE Abbreviated Journal Appl Surf Sci
Volume 63 Issue 1-4 Pages 45-51
Keywords A1 Journal article; Electron microscopy for materials research (EMAT)
Abstract The main results and conclusions are presented of a round robin study of silicon oxide on silicon reference samples for ellipsometry. The oxide films with nominal thicknesses of 10, 50 and 120 nm are grown by thermal oxidation. The oxide film thicknesses have been determined by single wavelength ellipsometry (SWE), by spectroscopic ellipsometry (SE) and by cross-sectional conventional and high-resolution transmission electron microscopy (TEM and HREM) in different laboratories. The main conclusions are that special precautions have to be taken in order to use TEM as a reliable thickness measurement technique; that single wavelength ellipsometry can be used with great accuracy and reproducibility for the 50 and 120 nm film thicknesses but that it shows some inherent problems for the 10 nm films; and that spectroscopic ellipsometry showed for all film thicknesses an accuracy and reproducibility which is clearly superior to that of SWE.
Address
Corporate Author Thesis
Publisher Elsevier science bv Place of Publication Amsterdam Editor
Language Wos A1993KF03400009 Publication Date 2002-10-16
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN 0169-4332; ISBN Additional Links UA library record; WoS full record; WoS citing articles
Impact Factor 2.711 Times cited 13 Open Access
Notes Approved
Call Number UA @ lucian @ c:irua:104539 Serial 2932
Permanent link to this record