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Author | Berezhnoi, S.; Kaganovich, I.; Bogaerts, A.; Gijbels, R. | ||||
Title | Modelling of radio frequency capacitively coupled plasma at intermediate pressures | Type | H3 Book chapter | ||
Year | 1999 | Publication | Abbreviated Journal | ||
Volume | Issue | Pages | 525-526 | ||
Keywords | H3 Book chapter; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) | ||||
Abstract | |||||
Address | |||||
Corporate Author | Thesis | ||||
Publisher | Kluwer Academic | Place of Publication | Dordrecht | Editor | |
Language | Wos | 000081413700048 | Publication Date | 0000-00-00 | |
Series Editor | Series Title | Abbreviated Series Title | |||
Series Volume | Series Issue | Edition | |||
ISSN | ISBN | Additional Links | UA library record; WoS full record; | ||
Impact Factor | Times cited | Open Access | |||
Notes | Approved | Most recent IF: NA | |||
Call Number | UA @ lucian @ c:irua:24925 | Serial | 2154 | ||
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