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“Chemical and structural analysis of etching residue layers in semiconductor devices with energy filtering transmission electron microscopy”. Hens S, van Landuyt J, Bender H, Boullart W, Vanhaelemeersch S, Materials science in semiconductor processing 4, 109 (2001). http://doi.org/10.1016/S1369-8001(00)00147-5
Abstract: The use of an energy-filtering held emission gun transmission electron microscope (CM30 FEG Ultratwin) allows, apart from imaging morphologies down to nanometer scale, the fast acquisition of high-resolution element distributions. Electrons that have lost energy corresponding to characteristic inner-shell loss edges are used to form the element maps. The production of Ultra Large-Scale Integration (ULSI) devices with dimensions below 0.25 mum requires among others the formation of a multilayer metallization scheme by means of repeatedly applying the deposition and etching of dielectrics and metals. In this work the evolution of the surface chemical species on etched Al lines in a post-etch cleaning process has been investigated by energy filtering transmission electron microscopy, with the aim to understand the role of each process step on the removal of the etching residues. (C) 2001 Elsevier Science Ltd. All rights reserved.
Keywords: A1 Journal article; Engineering sciences. Technology; Electron microscopy for materials research (EMAT)
Impact Factor: 2.359
DOI: 10.1016/S1369-8001(00)00147-5
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“The use of convergent beam electron diffraction for stress measurements in shallow trench isolation structures”. Stuer C, van Landuyt J, Bender H, Rooyackers R, Badenes G, Materials science in semiconductor processing 4, 117 (2001). http://doi.org/10.1016/S1369-8001(00)00110-4
Abstract: Shallow trench isolation (STI) is a promising technology for the isolation structures of the new generation of ULSI devices with dimensions below 0.18 mum. The various processing steps cause stress fields in STI structures, which can lead to defect formation in the silicon substrate. In their turn, stress fields affect the electrical parameters and the reliability of devices. Convergent beam electron diffraction (CBED) is used in this study to examine the influence of a wet and a dry pre-gate oxidation on the stress distribution around STI structures. The measurements are performed on STI structures with different width and spacing. CBED analysis is compared with bright-field TEM images. Defects are observed in high-strain areas of small isolated structures. (C) 2001 Elsevier Science Ltd. All rights reserved.
Keywords: A1 Journal article; Engineering sciences. Technology; Electron microscopy for materials research (EMAT)
Impact Factor: 2.359
Times cited: 6
DOI: 10.1016/S1369-8001(00)00110-4
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“Round-robin investigation of silicon-oxide on silicon reference materials for ellipsometry”. Vanhellemont J, Maes HE, Schaekers M, Armigliato A, Cerva H, Cullis A, de Sande J, Dinges H, Hallais J, Nayar V, Pickering C, Stehlé, JL, Van Landuyt J, Walker C, Werner H, Salieri P;, Applied surface science
T2 –, SYMP ON DIAGNOSTIC TECHNIQUES FOR SEMICONDUCTOR MATERIALS ANALYSIS AND, FABRICATION PROCESS CONTROL, AT THE 1992 SPRING CONF OF THE EUROPEAN, MATERIALS RESEARCH SOC, JUN 02-05, 1992, STRASBOURG, FRANCE 63, 45 (1993). http://doi.org/10.1016/0169-4332(93)90062-G
Abstract: The main results and conclusions are presented of a round robin study of silicon oxide on silicon reference samples for ellipsometry. The oxide films with nominal thicknesses of 10, 50 and 120 nm are grown by thermal oxidation. The oxide film thicknesses have been determined by single wavelength ellipsometry (SWE), by spectroscopic ellipsometry (SE) and by cross-sectional conventional and high-resolution transmission electron microscopy (TEM and HREM) in different laboratories. The main conclusions are that special precautions have to be taken in order to use TEM as a reliable thickness measurement technique; that single wavelength ellipsometry can be used with great accuracy and reproducibility for the 50 and 120 nm film thicknesses but that it shows some inherent problems for the 10 nm films; and that spectroscopic ellipsometry showed for all film thicknesses an accuracy and reproducibility which is clearly superior to that of SWE.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.711
Times cited: 13
DOI: 10.1016/0169-4332(93)90062-G
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“Coupled electron-hole transport: generalized random-phase approximation and density functional theory”. Tso HC, Vasilopoulos P, Peeters FM, Surface science : a journal devoted to the physics and chemistry of interfaces 305, 400 (1994). http://doi.org/10.1016/0039-6028(94)90925-3
Keywords: A1 Journal article; Condensed Matter Theory (CMT)
Impact Factor: 1.925
Times cited: 5
DOI: 10.1016/0039-6028(94)90925-3
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“Disappearance of magnetophonon resonance at high magnetic fields in GaAs-GaAlAs heterojunctions”. Leadley DR, Nicholas RJ, Singleton J, Xu W, Peeters FM, Devreese JT, van Bockstal L, Herlach F, Perenboom JAAJ, Harris JJ, Foxon CT, Surface science : a journal devoted to the physics and chemistry of interfaces 305, 327 (1994). http://doi.org/10.1016/0039-6028(94)90910-5
Keywords: A1 Journal article; Condensed Matter Theory (CMT); Theory of quantum systems and complex systems
Impact Factor: 1.925
Times cited: 1
DOI: 10.1016/0039-6028(94)90910-5
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“Infrared-spectroscopy of subbands, minibands, and donors in GaAs/AlGaAs superlattices”. Helm M, Peeters FM, de Rosa F, Colas E, Harbison JP, Florez LT, Surface science : a journal devoted to the physics and chemistry of interfaces
T2 –, 9TH INTERNATIONAL CONF ON THE ELECTRONIC PROPERTIES OF TWO-DIMENSIONAL, SYSTEMS ( EP2DS-9 ) / 5TH INTERNATIONAL CONF ON MODULATED SEMICONDUCTOR, STRUCTURES ( MSS-5 ), JUL 263, 518 (1992). http://doi.org/10.1016/0039-6028(92)90400-Z
Abstract: A far-infrared absorption study of electrons in lightly-doped GaAs/Al0.3Ga0.7As superlattices is presented. Both weakly and strongly coupled superlattices are investigated, and the difference between intersubband transitions and transitions between extended minibands is demonstrated. At low temperatures, the absorption spectra are dominated by donor transitions. The 1s-2p(z) transition, which is intimately related to the intersubband transition, is observed. All experimental data are compared to an envelope function calculation for the miniband structure and a variational calculation for the donor energies. Excellent agreement between experiment and theory is achieved.
Keywords: A1 Journal article; Condensed Matter Theory (CMT)
Impact Factor: 1.925
Times cited: 5
DOI: 10.1016/0039-6028(92)90400-Z
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“Resonant magnetopolaron coupling to both polar and neutral optical phonons in the layer compound InSe”. Peeters FM, Wu XG, Devreese JT, Watts M, Nicholas RJ, Howell DF, van Bockstal L, Herlach F, Langerak CJGM, Singleton J, Chevy A, Surface science 263, 654 (1992). http://doi.org/10.1016/0039-6028(92)90429-A
Keywords: A1 Journal article; Condensed Matter Theory (CMT); Theory of quantum systems and complex systems
Impact Factor: 1.925
Times cited: 4
DOI: 10.1016/0039-6028(92)90429-A
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“Transition energies of D- centers in a superlattice”. Shi JM, Peeters FM, Devreese JT, Surface science : a journal devoted to the physics and chemistry of interfaces 305, 220 (1994). http://doi.org/10.1016/0039-6028(94)90888-5
Keywords: A1 Journal article; Condensed Matter Theory (CMT); Theory of quantum systems and complex systems
Impact Factor: 1.925
Times cited: 6
DOI: 10.1016/0039-6028(94)90888-5
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“Two-dimensional tunneling through magnetic barriers”. Matulis A, Peeters FM, Vasilopoulos P, Surface science : a journal devoted to the physics and chemistry of interfaces 305, 434 (1994). http://doi.org/10.1016/0039-6028(94)90931-8
Keywords: A1 Journal article; Condensed Matter Theory (CMT)
Impact Factor: 1.925
Times cited: 2
DOI: 10.1016/0039-6028(94)90931-8
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“Defects in high-dose oxygen implanted silicon : a TEM study”. Deveirman A, van Landuyt J, Vanhellemont J, Maes HE, Yallup K, Vacuum: the international journal and abstracting service for vacuum science and technology
T2 –, 1ST SIOMX WORKSHOP ( SEPARATION BY IMPLANTATION OF OXYGEN ) ( SWI-88 ), NOV 07-08, 1988, UNIV SURREY, GUILDFORD, ENGLAND 42, 367 (1991). http://doi.org/10.1016/0042-207X(91)90055-N
Abstract: Results are discussed of a transmission electron microscopy study of high-dose oxygen implanted silicon. In addition to the general high temperature (> 1200-degrees-C) annealing treatments also annealings at 'low' temperatures (1000-1100-degrees-C) were performed in order to slow down the precipitate and defect reactions. The observed dissolution of the oxide precipitates during prolonged high temperature annealing is explained by critical radius considerations. Threading dislocations are the remaining lattice defects in the silicon overlayer and cannot be removed by further annealing. Low temperature annealing results in the formation and subsequent unfaulting of extrinsic stacking fault loops below the buried oxide layer.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 1.858
Times cited: 4
DOI: 10.1016/0042-207X(91)90055-N
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“Evolution of charged particle densities after laser-induced photodetachment in a strongly electronegative RF discharge”. Yan M, Bogaerts A, Gijbels R, IEEE transactions on plasma science 30, 132 (2002). http://doi.org/10.1109/TPS.2002.1003959
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 1.052
DOI: 10.1109/TPS.2002.1003959
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“Single-particle characterization of urban aerosol particles collected in three Korean cities using low-Z electron probe x-ray microanalysis”. Ro C-U, Kim H, Oh K-Y, Yea SK, Lee CB, Jang M, Van Grieken R, Environmental science and technology 36, 4770 (2002). http://doi.org/10.1021/ES025697Y
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1021/ES025697Y
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“Imaging TOF-SIMS for the surface analysis of silver halide microcrystals”. Lenaerts J, Gijbels R, van Vaeck L, Verlinden G, Geuens I, Applied surface science 203/204, 614 (2003). http://doi.org/10.1016/S0169-4332(02)00777-8
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 3.387
Times cited: 7
DOI: 10.1016/S0169-4332(02)00777-8
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“Ion-bombardment artifact in TOF-SIMS analysis of ZrO2/SiO2/Si stacks”. de Witte H, Conard T, Vandervorst W, Gijbels R, Applied surface science 203, 523 (2003). http://doi.org/10.1016/S0169-4332(02)00728-6
Abstract: We analyzed ultra-thin ZrO2/SiO2/Si gate dielectrics under post-deposition anneals in dry O-2 at temperatures from 500 to 700 degreesC. TOF-SIMS profiling of ZrO2/SiO2/Si stacks is hampered by many sputter induced artifacts. The depletion of oxygen leads to a decrease in SIMS intensities. However, preferential sputtering is accompanied by transport of the depleted species towards the surface. Due to recoil implantation oxygen gets piled-up near the ZrO2/SiO2 interface. Either normal or radiation-enhanced diffusion transports oxygen back to the surface. Simultaneously also segregation of zirconium towards and through the interface is observed, resulting in a large zirconium tail in the underlying silicon substrate. (C) 2002 Elsevier Science B.V. All rights reserved.
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 3.387
Times cited: 15
DOI: 10.1016/S0169-4332(02)00728-6
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“Electron microscopy characterisation of erbium silicide-thin films grown on a Si(111) substrate”. Frangis N, Van Tendeloo G, van Landuyt J, Muret P, Nguyen TTA, Applied surface science 102, 163 (1996). http://doi.org/10.1016/0169-4332(96)00040-2
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.711
Times cited: 9
DOI: 10.1016/0169-4332(96)00040-2
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“High crystalline quality erbium silicide films on (100) silicon grown in high vacuum”. Kaltsas G, Travlos A, Nassiopoulos AG, Frangis N, van Landuyt J, Applied surface science 102, 151 (1996). http://doi.org/10.1016/0169-4332(96)00036-0
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.711
Times cited: 14
DOI: 10.1016/0169-4332(96)00036-0
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“Photoelectric and electrical responses of several erbium silicide/silicon interfaces”. Muret P, Nguyen TTA, Frangis N, Van Tendeloo G, van Landuyt J, Applied surface science
T2 –, International Symposium on Si Heterostructures –, From Physics to Devices, SEP 11-14, 1995, IRAKLION, GREECE 102, 173 (1996). http://doi.org/10.1016/0169-4332(96)00042-6
Abstract: In this work, photoelectric yield and electrical properties of several types of epitaxial erbium silicide on silicon Schottky diodes are studied, Different preparation conditions are used simultaneously on n- and p-Si(111) substrates for the 200 Angstrom thick silicide films. A last type of sample consists in 1.3 monolayer of epitaxial silicide with root 3 X root 3 superstructure on the Si substrate and covered by silver on the top. Photocurrent measurements are done as a function of photon energy at several temperatures. All these samples show barrier heights near 1 eV on p-type Si, even for the interface comprising only 1.3 monolayer of silicide whereas barrier heights on n-rype Si span the range from 0.28 to 0.67 eV for this last kind of sample, the sum of the barriers always exceeding the silicon band gap, These photoelectric results are confirmed by electrical characterisations, All these results show that the Fermi level is pinned 0.1 eV below the conduction band edge on p-type Si but shifts to various positions lower within the band gap on n-type Si. This fact leads to the hypothesis of a density of -7 interface states close to the charge change in the Si depletion zone from p- to n-type, namely 10(12) eV(-1) cm(-2). Although some inhomogeneities and defects at the interface are detected by electron microscopy for samples annealed at 750 degrees C, Fermi level position seems rather insensitive to the structural details of the interface while the silicide thickness plays a role on n-type Si.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.711
Times cited: 3
DOI: 10.1016/0169-4332(96)00042-6
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“Long period surface ordering of iodine ions in mixed tabular AgBr-AgBrI microcrystals”. Goessens C, Schryvers D, van Landuyt J, Amelinckx S, de Keyzer R, Surface science : a journal devoted to the physics and chemistry of interfaces 337, 153 (1995). http://doi.org/10.1016/0039-6028(95)00000-3
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 1.925
Times cited: 10
DOI: 10.1016/0039-6028(95)00000-3
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“Order and twining in Sb2W0.75Mo0.25O6”. Enjalbert R, Galy J, Castro A, Lidin S, Withers R, Van Tendeloo G, Solid state sciences 5, 721 (2003). http://doi.org/10.1016/S1293-2558(03)00093-1
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 1.811
Times cited: 3
DOI: 10.1016/S1293-2558(03)00093-1
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“Synthesis and structure of Sr2MnGaO5+\delta brownmillerites with variable oxygen content”. Abakumov AM, Rozova MG, Alekseeva AM, Kovba ML, Antipov EV, Lebedev OI, Van Tendeloo G, Solid state sciences 5, 871 (2003). http://doi.org/10.1016/S1293-2558(03)00112-2
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 1.811
Times cited: 12
DOI: 10.1016/S1293-2558(03)00112-2
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“Synthesis and structural investigations on the new Sr1.32Mn0.83Cu0.17O3 compound”. Abakumov AM, Mironov AV, Govorov VA, Lobanov MV, Rozova MG, Antipov EV, Lebedev OI, Van Tendeloo G, Solid state sciences 5, 1117 (2003). http://doi.org/10.1016/S1293-2558(03)00141-9
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 1.811
Times cited: 8
DOI: 10.1016/S1293-2558(03)00141-9
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“Application of electron energy loss spectroscopy to aerosols”. Xhoffer C, Jacob W, Van Grieken R, Journal of aerosol science 20, 1617 (1989). http://doi.org/10.1016/0021-8502(89)90901-4
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1016/0021-8502(89)90901-4
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“Characterization of airborne particulate matter collected over the North Sea”. Rojas CM, Otten PM, Van Grieken RE, Journal of aerosol science 20, 1257 (1989). http://doi.org/10.1016/0021-8502(89)90811-2
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1016/0021-8502(89)90811-2
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“Penetration of atmospheric aerosols during collection in cellulose filters, studied by secondary ion mass spectrometry”. Rojas CM, Goossens D, Van Grieken R, Journal of aerosol science 20, 569 (1989). http://doi.org/10.1016/0021-8502(89)90103-1
Abstract: The penetration of aerosol particles in a Whatman-41 cellulose filter has been studied via the depth profiles of different elements present in the aerosol. Depth profiles were obtained by analyzing both fine and coarse fractions from a dichotomous sampler by secondary ion mass spectrometry. The fine particles had an aerodynamic diameter dae of less than 2.5 μm, whereas the coarse fraction had 2.5 ≤ dae ≤ 15 μm. Elements such as Al, Si, Ca, Ti and Fe were associated with coarse airborne particles, while S, Cl, Zn, and Br were more abundant in the fine fraction. Results showed that particle size plays an important role in the distribution of particulate matter throughout the filter. SiTi-containing particles were mostly deposited near the surface of the filter, and their profiles can be estimated using a polynomial function, whereas the profile of AlCaFe-containing particles can be approached by an exponential decay function. Elements associated with fine fraction aerosols mainly originating from combustion processes, can penetrate up to about 25% of the total filter thickness, and their profiles are better represented by a diffusion function.
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1016/0021-8502(89)90103-1
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“A one-dimensional fluid model for an acetylene rf discharge: a study of the plasma chemistry”. Herrebout D, Bogaerts A, Gijbels R, Goedheer WJ, Vanhulsel A, IEEE transactions on plasma science 31, 659 (2003). http://doi.org/10.1109/TPS.2003.815249
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 1.052
Times cited: 26
DOI: 10.1109/TPS.2003.815249
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“The elemental composition of airborne particulate matter in the Atacama desert, Chile”. Rojas CM, Figueroa L, Janssens KH, Van Espen PE, Adams FC, Van Grieken RE, The science of the total environment 91, 251 (1990). http://doi.org/10.1016/0048-9697(90)90302-B
Abstract: Air particulate samples were collected at Chapiquiña near Arica (Chile) with a six-stage cascade impactor for about 17-day periods during a 31 month interval. Sixteen elements were determined by energy dispersive X-ray fluorescence analysis, and the elemental concentrations were subjected to principal factor analysis. The variability with time of the coarse particles was described by two factors both related to soil dispersion, whereas the fine particle variations could be explained by a third factor related to marine influence. Enrichment factors were compared with those obtained in other remote continental areas, in particular those of air particulate matter sampled at Chacaltaya, Bolivia. Results point to a negligible anthropogenic influence.
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1016/0048-9697(90)90302-B
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“Air-pollution-induced chemical decay of a sandy-limestone cathedral in Belgium”. Leysen L, Roekens E, Van Grieken R, The science of the total environment 78, 263 (1989). http://doi.org/10.1016/0048-9697(89)90038-7
Abstract: Different trace- and microanalytical techniques were used in an extensive study to elucidate the chemical deterioration process of the sandy-limestone St Rombouts Cathedral in Mechelen, Belgium. Samples of stones, mortar joints, slates, atmospheric aerosols and gases, total and wet deposition, and water that had run down the cathedral walls, were all thoroughly characterized. At the east side, usually not exposed to precipitation, a 3001000-μm thick outer crust of microcrystalline gypsum was observed, while at the west side, this surface layer was mostly eroded away due to precipitation. At the north and south sides, the crust contains varying amounts of gypsum and calcite. The gypsum is mostly present in a bar-shaped morphology and carbonaceous fly-ash particles were rarely found in the weathering crust. Local stone characteristics seem to be extremely important in relation to the gypsum content of the crust; black samples always have a much higher sulphate content than the corresponding white samples, irrespective of the predominant direction of orientation. The relative contribution of nitrogen- and chlorine-containing pollutants to the total decay process is much smaller than that of sulphur-containing pollutants. Deposition samples collected at the site of the cathedral mostly had a pH of > 5.6, due to the neutralization of the rainwater by alkaline atmospheric constituents. Runoff water and washdown water were enriched in all ions, especially Ca2+ and SO42−, indicating that, indeed, gypsum is the most important weathering product. The suspension in deposition samples and black-well leaching water was highly enriched in silicon-containing particles, while runoff water and white-wall leaching water contained a predominant calcium-rich suspension.
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1016/0048-9697(89)90038-7
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“Characterization of the weathering crust of various historical buildings in Belgium”. Leysen LA, Roekens EJ, Van Grieken RE, De Geyter G, The science of the total environment 90, 117 (1990). http://doi.org/10.1016/0048-9697(90)90190-6
Abstract: A variety of samples, collected from different historical buildings and monuments throughout Belgium, were thoroughly studied, using several trace- and micro-analysis techniques. Thin sections of stones and mortar joints were characterized by means of electron probe X-ray microanalysis (EPXMA). The morphological appearance of the surface weathering crust and the possible presence of non-innate particles in the crust were elucidated using petrographical and electron microscopy. Quantitative characterization of the total chemical composition of the crust surface layer and underlying layer was performed by energy-dispersive X-ray fluorescence, and by ion chromatography and atomic absorption spectrometry for the leachable components. Special attention was also paid to the chemical composition of rain and air at the particular sampling sites. The element distribution in the transition zone between the weathering crust and the original stone material was found to vary greatly amongst the different samples analyzed. Detailed EPXMA measurements on pieces of the weathering crust showed remarkable differences in morphology and composition between the surface and the underlying layer, and provided information about the presence of fly-ash and soil dust particles in the crust. Except for crusts from the city of Brussels, which were all very high in sulphate, the samples appeared to contain very variable sulphate contents; very local micro-climate and environmental conditions at a particular site are more important in determining the weathering condition of the building stones than the local air pollution situation. Bulk analytical characterization further showed, in all the crust samples studied, a very small contribution of nitrogen- and chlorine-containing weathering products, in contrast to sulphur-containing weathering salts.
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1016/0048-9697(90)90190-6
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“Composition and sources of atmospheric particulate matter at Kayseri, Central Turkey”. Kartal S, Dogan M, Rojas CM, Van Grieken R, The science of the total environment 133, 83 (1993). http://doi.org/10.1016/0048-9697(93)90114-L
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1016/0048-9697(93)90114-L
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“Elemental concentrations and heavy metal pollution in sediments and suspended matter from the Belgian North Sea and the Scheldt estuary”. van Alsenoy V, Bernard P, Van Grieken R, The science of the total environment 133, 153 (1993). http://doi.org/10.1016/0048-9697(93)90119-Q
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1016/0048-9697(93)90119-Q
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