“Characterisation of the local stress induced by shallow trench isolation and CoSi2 silicidation”. Stuer C, Steegen A, van Landuyt J, Bender H, Maex K, Institute of physics conference series , 481 (2001)
Abstract: With further down-scaling below 0.25mum technologies, CoSi2 is replacing TiSi2 because of its superior formation chemistry on narrow lines and favourable stress behaviour. Shallow trench isolation (STI) is used as the isolation technique in these technologies. In this study, convergent beam electron diffraction (CBED) measurements and finite element modelling (FEM) are performed to evaluate the local stress components in the silicon substrate, induced in STI structures with a 45 nm or a 85 nm CoSi2 silicidation. High compressive stresses in the active area and tensile stress around the trench corners are observed.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
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“EFTEM study of plasma etched low-k Si-O-C dielectrics”. Hens S, Bender H, Donaton RA, Maex K, Vanhaelemeersch S, van Landuyt J, Institute of physics conference series
T2 –, Royal-Microscopical-Society Conference on Microscopy of Semiconducting, Materials, MAR 25-29, 2001, UNIV OXFORD, OXFORD, ENGLAND , 415 (2001)
Abstract: Materials with low dielectric constant ("low-k'') in combination with Cu metallization are replacing the oxide based dielectrics with Al metallization in future generations of micro-electronic devices. In this work, a carbon doped oxide low-k dielectric material is studied after different kinds of etch/strip steps in single damascene Cu. filled line structures. Interline capacitance measurements indicate a dependence of the dielectric constant on the strip conditions. EFTEM is used to study the composition of the dielectric material and the modification of the low-k material at the sidewall of the etched structures for the various treatment conditions.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
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“Exchange of fluorinated cyanine dyes between different types of silver halide microcrystals studied by imaging time-of-flight secondary ion mass spectrometry”. Lenaerts J, Verlinden G, van Vaeck L, Gijbels R, Geuens I, Callant P, Langmuir 17, 7332 (2001). http://doi.org/10.1021/la010862t
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 3.833
Times cited: 8
DOI: 10.1021/la010862t
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“Non-ionic surfactant (C13EOm, m=6, 12 and 18) for large pore mesoporous molecular sieves preparation”. Blin JL, Becue A, Pauwels B, Van Tendeloo G, Su BL, Microporous and mesoporous materials 44/45, 41 (2001). http://doi.org/10.1016/S1387-1811(01)00167-6
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 3.615
Times cited: 27
DOI: 10.1016/S1387-1811(01)00167-6
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“High resolution electron microscopy from imaging towards measuring”. Van Aert S, den Dekker AJ, van den Bos A, Van Dyck D ... IEEE International Instrumentation and Measurement Technology Conference
T2 – Rediscovering measurement in the age of informatics : proceedings of the 18th IEEE Instrumentation and Measurement Technology Conference (IMTC), 2001: vol 3. Ieee, page 2081 (2001).
Keywords: H2 Book chapter; Electron microscopy for materials research (EMAT); Vision lab
DOI: 10.1109/IMTC.2001.929564
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“Component selection for a compact micro-XRF spectrometer”. Bichlmeier S, Janssens K, Heckel J, Gibson D, Hoffmann P, Ortner HM, X-ray spectrometry 30, 8 (2001). http://doi.org/10.1002/XRS.457
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
Impact Factor: 1.298
Times cited: 33
DOI: 10.1002/XRS.457
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“High energy X-ray microscopy for characterisation of fuel particles”. Salbu B, Krekling T, Lind OC, Oughton DH, Drakopoulos M, Simionovici AS, Snigireva I, Snigirev A, Weitkamp T, Adams F, Janssens K, Kashparov VA, Nuclear instruments and methods in physics research : A: accelerators, spectrometers, detectors and associated equipment 467, 1249 (2001). http://doi.org/10.1016/S0168-9002(01)00641-6
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
Impact Factor: 1.362
DOI: 10.1016/S0168-9002(01)00641-6
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“ID18F: a new micro-X-ray fluorescence end-station at the European Synchrotron Radiation Facility (ESRF): preliminary results”. Somogyi A, Drakopoulos M, Vincze L, Vekemans B, Camerani C, Janssens K, Snigirev A, Adams F, X-ray spectrometry 30, 242 (2001). http://doi.org/10.1002/XRS.494.ABS
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
Impact Factor: 1.298
Times cited: 76
DOI: 10.1002/XRS.494.ABS
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“Micro-heterogeneity study of trace elements in BCR CRM 680 by means of synchrotron micro-XRF”. Kempenaers L, de Koster C, van Borm W, Janssens K, Fresenius' journal of analytical chemistry 369, 733 (2001). http://doi.org/10.1007/S002160000679
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
Times cited: 15
DOI: 10.1007/S002160000679
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“Novel quantitative procedures for in-situ X-ray fluorescence analysis”. Injuk J, Janssens K, van Espen P, Van Grieken R, (2001)
Keywords: P3 Proceeding; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation); Chemometrics (Mitac 3)
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“Trace analysis allows to distinguish between Venetian and facon-de-Venise glass vessels of the 16th and 17th century”. de Raedt I, Janssens K, Veeckman J, Vincze L, Vekemans B, Jeffries T, Journal of analytical atomic spectrometry 16, 1012 (2001). http://doi.org/10.1039/B102597J
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
Impact Factor: 3.379
Times cited: 49
DOI: 10.1039/B102597J
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“The use of LA-ICP-MS for the characterization of the micro-heterogeneity of heavy metals in BCR CRM 680”. Kempenaers L, Bings NH, Jeffries TE, Vekemans B, Janssens K, Journal of analytical atomic spectrometry 16, 1006 (2001). http://doi.org/10.1039/B102512K
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
Impact Factor: 3.379
Times cited: 23
DOI: 10.1039/B102512K
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“X-ray fluorescence microtomography”. Chukalina M, Simionovici AS, Snigirev A, Drakopoulos M, Snigireva I, Adams F, Janssens K, Poverhnost 3, 40 (2001)
Keywords: A3 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
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“Analysis of speleothems by electron and X-ray microprobes”. Kuczumow A, Vekemans B, Schalm O, Gysels K, Ro C-U, Van Grieken R, Journal of analytical atomic spectrometry 16, 90 (2001). http://doi.org/10.1039/B007725I
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1039/B007725I
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“Analytical methods to study atmospheric pollution and weathering of materials”. Van Grieken R, Cardell C, Delalieux F, Eyckmans K page 163 (2001).
Keywords: H3 Book chapter; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
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“Application of chemometric methods for classification of atmospheric particles based on thin-window electron probe microanalysis data”. Osán J, de Hoog J, Worobiec A, Ro C-U, Oh K-Y, Szalóki I, Van Grieken R, Analytica chimica acta 446, 211 (2001)
Keywords: A1 Journal article; Laboratory Experimental Medicine and Pediatrics (LEMP); AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
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“Application of light beams with non-zero angular momentum in optical study of micrometer-size aerosol particles”. Bekshaev A, Kontush S, Popov A, Van Grieken R, , 288 (2001). http://doi.org/10.1117/12.428282
Keywords: P1 Proceeding; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1117/12.428282
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“Characterization of atmospheric aerosol particles over Lake Balaton, Hungary, using X-ray emission methods”. Osán J, Alföldy B, Kurunczi S, Török S, Bozó, L, Worobiec A, Injuk J, Van Grieken R, Idöjárás: quarterly journal of the Hungarian Meteorological Service 105, 145 (2001)
Keywords: A3 Journal article; Laboratory Experimental Medicine and Pediatrics (LEMP); AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
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“Chemical speciation of individual atmospheric particles using low-Z electron probe X-ray microanalysis characterizing “Asian Dust&rdquo, deposited with rainwater in Seoul, Korea”. Ro C-U, Oh K-Y, Kim HK, Chun Y, Osán J, de Hoog J, Van Grieken R, Atmospheric environment : an international journal 35, 4995 (2001). http://doi.org/10.1016/S1352-2310(01)00287-4
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1016/S1352-2310(01)00287-4
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“Correlation between aerosols, deposits, and weathering crusts on ancient marbles”. Moropoulou A, Bisbikou K, Van Grieken R, Torfs K, Polikreti K, Environmental technology 22, 607 (2001). http://doi.org/10.1080/09593332208618236
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1080/09593332208618236
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“Efficiency calibartion of energy-dispersive detectors for application in quantitative x- and γ-ray spectrometry”. Szalóki I, Szegedi S, Varga K, Braun M, Osán J, Van Grieken R, X-ray spectrometry 30, 49 (2001). http://doi.org/10.1002/XRS.467
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1002/XRS.467
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“Elemental composition of mineral aerosol generated from Sudan Sahara sand”. Eltayeb MAH, Injuk J, Maenhaut W, Van Grieken RE, Journal of atmospheric chemistry 40, 247 (2001). http://doi.org/10.1023/A:1012272208129
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1023/A:1012272208129
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“Environmental conditions controlling the chemical weathering of the Madara Horseman monument, NE Bulgaria”. Delalieux F, Cardell C, Todorov V, Dekov V, Van Grieken R, Journal of cultural heritage 2, 43 (2001)
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
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“Environmental monitoring in four European museums”. Camuffo D, Van Grieken R, Busse H-J, Sturaro G, Valentino A, Bernardi A, Blades N, Shooter D, Gysels K, Deutsch F, Wieser M, Kim O, Ulrych U, Atmospheric environment : an international journal 35, S127 (2001)
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
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“Evaluation of energy-dispersive x-ray spectra of low-Z elements from electron-probe microanalysis of individual particles”. Osán J, de Hoog J, van Espen P, Szalóki I, Ro C-U, Van Grieken R, X-ray spectrometry 30, 419 (2001). http://doi.org/10.1002/XRS.523
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation); Chemometrics (Mitac 3)
DOI: 10.1002/XRS.523
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“Geen vuiltje aan de Noordzeelucht: aërosolen kennen geen grenzen”. Van Grieken R, Eyckmans K, (2001)
Keywords: P3 Proceeding; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
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“Grazing-emission electron probe microanalysis of particles near the substrate edge”. Bekshaev A, de Hoog J, Van Grieken R, Spectrochimica acta: part B : atomic spectroscopy 56, 2385 (2001). http://doi.org/10.1016/S0584-8547(01)00300-7
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1016/S0584-8547(01)00300-7
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“Health risk assessment of urban suspended particulate matter with special reference to polycyclic aromatic hydrocarbons: a review”. Ravindra K, Mittal AK, Van Grieken R, Reviews on environmnetal health 16, 169 (2001)
Keywords: A3 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
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“Heterogeneity assessment in individual CaCO3-CaSO4 particles using ultrathin window electron probe X-ray microanalysis”. Ro C-U, Oh K-Y, Osán J, de Hoog J, Worobiec A, Van Grieken R, Analytical chemistry 73, 4574 (2001). http://doi.org/10.1021/AC010438X
Keywords: A1 Journal article; Laboratory Experimental Medicine and Pediatrics (LEMP); AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1021/AC010438X
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“Individual particle characterization of Siberian aerosols by micro-PIXE and backscattering spectrometry”. van Malderen H, Hoornaert S, Injuk J, Przybylowicz WJ, Pineda CA, Prozesky VM, Van Grieken R, X-ray spectrometry 30, 320 (2001). http://doi.org/10.1002/XRS.505
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1002/XRS.505
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