Abstract: The penetration of aerosol particles in a Whatman-41 cellulose filter has been studied via the depth profiles of different elements present in the aerosol. Depth profiles were obtained by analyzing both fine and coarse fractions from a dichotomous sampler by secondary ion mass spectrometry. The fine particles had an aerodynamic diameter dae of less than 2.5 μm, whereas the coarse fraction had 2.5 ≤ dae ≤ 15 μm. Elements such as Al, Si, Ca, Ti and Fe were associated with coarse airborne particles, while S, Cl, Zn, and Br were more abundant in the fine fraction. Results showed that particle size plays an important role in the distribution of particulate matter throughout the filter. SiTi-containing particles were mostly deposited near the surface of the filter, and their profiles can be estimated using a polynomial function, whereas the profile of AlCaFe-containing particles can be approached by an exponential decay function. Elements associated with fine fraction aerosols mainly originating from combustion processes, can penetrate up to about 25% of the total filter thickness, and their profiles are better represented by a diffusion function.