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Title
Year
Publication
Volume
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Bogaerts, A.
;
Naylor, J.
;
Hatcher, M.
;
Jones, W.J.
;
Mason, R.
Influence of sticking coefficients on the behavior of sputtered atoms in an argon glow discharge: modeling and comparison with experiment
1998
Journal of vacuum science and technology: A: vacuum surfaces and films
16
12
UA library record
;
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;
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