| Author |
Title |
Year |
Publication |
Volume |
Times cited |
Additional Links |
| Van Laer, K.; Tinck, S.; Samara, V.; de Marneffe, J.F.; Bogaerts, A. |
Etching of low-k materials for microelectronics applications by means of a N2/H2 plasma : modeling and experimental investigation |
2013 |
Plasma sources science and technology |
22 |
13 |
UA library record; WoS full record; WoS citing articles |
| Kozák, T.; Bogaerts, A. |
Evaluation of the energy efficiency of CO2 conversion in microwave discharges using a reaction kinetics model |
2015 |
Plasma sources science and technology |
24 |
100 |
UA library record; WoS full record; WoS citing articles |
| Yan, M.; Bogaerts, A.; Gijbels, R. |
Evolution of charged particle densities after laser-induced photodetachment in a strongly electronegative RF discharge |
2002 |
IEEE transactions on plasma science |
30 |
|
UA library record; WoS full record |
| van Straaten, M.; Bogaerts, A.; Gijbels, R. |
Experimental determination of the energy distribution of ions bombarding the cathode surface in a glow discharge |
1995 |
Spectrochimica acta: part B : atomic spectroscopy |
50 |
22 |
UA library record; WoS full record; WoS citing articles |
| De Bie, C.; Verheyde, B.; Martens, T.; van Dijk, J.; Paulussen, S.; Bogaerts, A. |
Fluid modeling of the conversion of methane into higher hydrocarbons in an atmospheric pressure dielectric barrier discharge |
2011 |
Plasma processes and polymers |
8 |
70 |
UA library record; WoS full record; WoS citing articles |
| Petrović, D.; Martens, T.; van Dijk, J.; Brok, W.J.M.; Bogaerts, A. |
Fluid modelling of an atmospheric pressure dielectric barrier discharge in cylindrical geometry |
2009 |
Journal of physics: D: applied physics |
42 |
29 |
UA library record; WoS full record; WoS citing articles |
| Zhang, Y.-R.; Gao, F.; Li, X.-C.; Bogaerts, A.; Wang, Y.-N. |
Fluid simulation of the bias effect in inductive/capacitive discharges |
2015 |
Journal of vacuum science and technology: A: vacuum surfaces and films |
33 |
9 |
UA library record; WoS full record; WoS citing articles |
| Zhang, Y.-R.; Xu, X.; Bogaerts, A.; Wang, Y.-N. |
Fluid simulation of the phase-shift effect in hydrogen capacitively coupled plasmas: 1 : transient behaviour of electrodynamics and power deposition |
2012 |
Journal of physics: D: applied physics |
45 |
57 |
UA library record; WoS full record; WoS citing articles |
| Zhang, Y.-R.; Xu, X.; Bogaerts, A.; Wang, Y.-N. |
Fluid simulation of the phase-shift effect in hydrogen capacitively coupled plasmas: 2 : radial uniformity of the plasma characteristics |
2012 |
Journal of physics: D: applied physics |
45 |
15 |
UA library record; WoS full record; WoS citing articles |
| Zhang, Y.-R.; Bogaerts, A.; Wang, Y.-N. |
Fluid simulation of the phase-shift effect in Ar/CF4 capacitively coupled plasmas |
2012 |
Journal of physics: D: applied physics |
45 |
8 |
UA library record; WoS full record; WoS citing articles |
| Si, X.-J.; Zhao, S.-X.; Xu, X.; Bogaerts, A.; Wang, Y.-N. |
Fluid simulations of frequency effects on nonlinear harmonics in inductively coupled plasma |
2011 |
Physics of plasmas |
18 |
7 |
UA library record; WoS full record; WoS citing articles |
| Tinck, S.; Altamirano-Sánchez, E.; De Schepper, P.; Bogaerts, A. |
Formation of a nanoscale SiO2 capping layer on photoresist lines with an Ar/SiCl4/O2 inductively coupled plasma : a modeling investigation |
2014 |
Plasma processes and polymers |
11 |
1 |
UA library record; WoS full record; WoS citing articles |
| Neyts, E.C.; Bogaerts, A. |
Formation of endohedral Ni@C60 and exohedral NiC60 metallofullerene complexes by simulated ion implantation |
2009 |
Carbon |
47 |
15 |
UA library record; WoS full record; WoS citing articles |
| Bogaerts, A.; Gijbels, R. |
Fundamental aspects and applications of glow discharge spectrometric techniques |
1998 |
Spectrochimica acta: part B : atomic spectroscopy |
53 |
49 |
UA library record; WoS full record; WoS citing articles |
| Gamez, G.; Bogaerts, A.; Andrade, F.; Hieftje, G.M. |
Fundamental studies on a planar-cathode direct current glow discharge: part 1: characterization via laser scattering techniques |
2004 |
Spectrochimica acta: part B : atomic spectroscopy |
59 |
24 |
UA library record; WoS full record; WoS citing articles |
| Bogaerts, A.; Gijbels, R.; Gamez, G.; Hieftje, G.M. |
Fundamental studies on a planar-cathode direct current glow discharge: part 2: numerical modeling and comparison with laser scattering experiments |
2004 |
Spectrochimica acta: part B : atomic spectroscopy |
59 |
26 |
UA library record; WoS full record; WoS citing articles |
| Bogaerts, A.; Neyts, E.; Gijbels, R.; van der Mullen, J. |
Gas discharge plasmas and their applications |
2002 |
Spectrochimica acta: part B : atomic spectroscopy |
57 |
462 |
UA library record; WoS full record; WoS citing articles |
| Aerts, R.; Tu, X.; Van Gaens, W.; Whitehead, J.C.; Bogaerts, A. |
Gas purification by nonthermal plasma : a case study of ethylene |
2013 |
Environmental science and technology |
47 |
56 |
UA library record; WoS full record; WoS citing articles |
| Zhao, S.-X.; Gao, F.; Wang, Y.-N.; Bogaerts, A. |
Gas ratio effects on the Si etch rate and profile uniformity in an inductively coupled Ar/CF4 plasma |
2013 |
Plasma sources science and technology |
22 |
11 |
UA library record; WoS full record; WoS citing articles |
| Bogaerts, A. |
The glow discharge: an exciting plasma |
1999 |
Journal of analytical atomic spectrometry |
14 |
29 |
UA library record; WoS full record; WoS citing articles |
| Bogaerts, A.; Chen, Z.; Gijbels, R. |
Glow discharge modelling: from basic understanding towards applications |
2003 |
Surface and interface analysis |
35 |
14 |
UA library record; WoS full record; WoS citing articles |
| Angeli, J.; Bengtson, A.; Bogaerts, A.; Hoffmann, V.; Hodoroaba, V.-D.; Steers, E. |
Glow discharge optical emission spectrometry: moving towards reliable thin film analysis: a short review |
2003 |
Journal of analytical atomic spectrometry |
18 |
75 |
UA library record; WoS full record; WoS citing articles |
| Zhang, Q.-Z.; Liu, Y.-X.; Jiang, W.; Bogaerts, A.; Wang, Y.-N. |
Heating mechanism in direct current superposed single-frequency and dual-frequency capacitively coupled plasmas |
2013 |
Plasma sources science and technology |
22 |
9 |
UA library record; WoS full record; WoS citing articles |
| Zhang, Q.-Z.; Wang, Y.-N.; Bogaerts, A. |
Heating mode transition in a hybrid direct current/dual-frequency capacitively coupled CF4 discharge |
2014 |
Journal of applied physics |
115 |
9 |
UA library record; WoS full record; WoS citing articles |
| Bogaerts, A.; Okhrimovskyy, A.; Baguer, N.; Gijbels, R. |
Hollow cathode discharges with gas flow: numerical modelling for the effect on the sputtered atoms and the deposition flux |
2005 |
Plasma sources science and technology |
14 |
9 |
UA library record; WoS full record; WoS citing articles |
| Khosravian, N.; Bogaerts, A.; Huygh, S.; Yusupov, M.; Neyts, E.C. |
How do plasma-generated OH radicals react with biofilm components? Insights from atomic scale simulations |
2015 |
Biointerphases |
10 |
10 |
UA library record; WoS full record; WoS citing articles |
| Baguer, N.; Bogaerts, A.; Gijbels, R. |
Hybrid model for a cylindrical hollow cathode glow discharge and comparison with experiments |
2002 |
Spectrochimica acta: part B : atomic spectroscopy |
57 |
31 |
UA library record; WoS full record; WoS citing articles |
| Bogaerts, A.; Gijbels, R. |
Hybrid modeling network for a helium-argon-copper hollow cathode discharge used for laser applications |
2002 |
Journal of applied physics |
92 |
24 |
UA library record; WoS full record; WoS citing articles |
| Bogaerts, A.; Gijbels, R.; Goedheer, W. |
Hybrid modeling of a capacitively coupled radio frequency glow discharge in argon: combined Monte Carlo and fluid model |
1999 |
Japanese journal of applied physics |
38 |
45 |
UA library record; WoS full record; WoS citing articles |
| Bogaerts, A.; Gijbels, R. |
Hybrid Monte Carlo-fluid model for a microsecond pulsed glow discharge |
2000 |
Journal of analytical atomic spectrometry |
15 |
23 |
UA library record; WoS full record; WoS citing articles |
