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“Compositional analysis of Tuscan glass samples: in search of raw materials fingerprints”. Cagno S, Janssens K, Mendera M, Analytical and bioanalytical chemistry 391, 1389 (2008). http://doi.org/10.1007/S00216-008-1945-8
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
Impact Factor: 3.431
Times cited: 26
DOI: 10.1007/S00216-008-1945-8
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“Euroanalysis 14: the European Conference on Analytical Chemistry”. Janssens K, van Espen P, Van 't dack L, Analytical and bioanalytical chemistry 391, 1107 (2008). http://doi.org/10.1007/S00216-008-2114-9
Keywords: Editorial; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation); Chemometrics (Mitac 3)
Impact Factor: 3.431
DOI: 10.1007/S00216-008-2114-9
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“Investigating morphological changes in treated vs. untreated stone building materials by x-ray micro-CT”. Bugani S, Camaiti M, Morselli L, Van de Casteele E, Janssens K, Analytical and bioanalytical chemistry 391, 1343 (2008). http://doi.org/10.1007/S00216-008-1946-7
Keywords: A1 Journal article; Vision lab; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
Impact Factor: 3.431
Times cited: 25
DOI: 10.1007/S00216-008-1946-7
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“mu-X-ray fluorescence and mu-X-ray diffraction investigations of sediment from the Ruprechtov nuclear waste disposal natural analog site”. Denecke MA, de Nolf W, Janssens K, Brendebach B, Falkenberg G, Noseck U, Rothkirch A, Spectrochimica acta: part B : atomic spectroscopy 63, 484 (2008). http://doi.org/10.1016/J.SAB.2008.01.001
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
Impact Factor: 3.241
Times cited: 7
DOI: 10.1016/J.SAB.2008.01.001
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“Assessment of aerosol particles within the Rubens' House Museum in Antwerp, Belgium”. Godoi RHM, Potgieter-Vermaak S, Godoi AFL, Stranger M, Van Grieken R, X-ray spectrometry 37, 298 (2008). http://doi.org/10.1002/XRS.1049
Abstract: The majority of researchers, conservators and curators recognise that atmospheric pollution is one of the major threats to works of art. In principle, all atmospheric particles, when deposited onto art objects can be considered harmful because of their potential in causing deterioration. Moreover, under certain conditions, particulate matter can induce and intensify surface damage, particularly because of its potential to serve as centre for moisture condensation and adsorbent of gaseous pollutants. To investigate the potential harm that these particles can cause, comprehensive characterisation of the particulate matter is necessary. Particulate matter was collected at the Rubens' House Museum in Antwerp, Belgium, where a unique exhibit of the paintings and living quarters of Peter Paul Rubens (1577-1640) are seen. Size segregated aerosol samples were collected for analyses of bulk and single particle elemental and molecular compositions. They were analysed by electron probe micro-analysis, utilising facilities for low-Z element determination, and by energy-dispersive x-ray fluorescence, to investigate the elemental composition of individual particles and bulk samples, and by micro Raman spectrometry, to elucidate the molecular composition. Results are interpreted separately and as a whole with the specific aim of identifying compounds that could contribute to the chemical reactions taking place on the surfaces of artefacts and which could potentially cause degradation of the objects.
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1002/XRS.1049
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“Historical changes in air pollution in the tri-border region of Poland, Czech Republic and Germany”. Worobiec A, Zwozdziak A, Sówka I, Zwozdziak J, Stefaniak EA, Buczyńska A, Krata A, van Meel K, Van Grieken R, Górka M, Jedrysek M-O, Environment protection engineering 34, 81 (2008)
Abstract: In this study, we show the trends in the concentration Of SO2 and particulate matter (PM) in two health resorts, located in the tri-border region of Poland, Germany and Czech Republic. We analyze the annual time series and the seasonal variability of PM concentration for the months of July and February over the period of 1996-2007. Additionally, in July 2006, we measured the mean 24-hour concentration of PM and the content of heavy metals (by EDXRF analysis). We prove that nowadays air pollution in this region has diminished to a large extent as compared to the 90s of the last century. In Cieplice, the local influence is still evident; while Czerniawa is exposed to a periodical advection of polluted air from regional sources.
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation); Laboratory Experimental Medicine and Pediatrics (LEMP)
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“Particulate matter analysis at elementary schools in Curitiba, Brazil”. Avigo D, Godoi AFL, Janissek PR, Makarovska Y, Krata A, Potgieter-Vermaak S, Alfoldy B, Van Grieken R, Godoi RHM, Analytical and bioanalytical chemistry 391, 1459 (2008). http://doi.org/10.1007/S00216-008-2031-Y
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1007/S00216-008-2031-Y
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“NO2 verkeersmetingen in Vlaanderen door passieve bemonstering”. Potgieter-Vermaak S, Stranger M, Verlinden L, Roekens E, Van Grieken R, Die Suid-Afrikaanse tydskrif vir natuurwetenskap en tegnologie 27, 266 (2008)
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
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“Platinumcarbon nanotube interaction”. Bittencourt C, Hecq M, Felten A, Pireaux JJ, Ghijsen J, Felicissimo MP, Rudolf P, Drube W, Ke X, Van Tendeloo G, Chemical physics letters 462, 260 (2008). http://doi.org/10.1016/j.cplett.2008.07.082
Abstract: The interaction between evaporated Pt and pristine or oxygen-plasma-treated multiwall carbon nanotubes (CNTs) is investigated. Pt is found to nucleate at defect sites, whether initially present or introduced by oxygen plasma treatment. The plasma treatment induces a uniform dispersion of Pt nanoparticles at the CNT surface. The absence of additional features in the C 1s core level spectrum indicates that no mixed PtC phase is formed. The formation of COPt bonds at the cluster-CNT interface is suggested to reduce the electronic interaction between Pt nanoparticles and the CNT surface.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 1.815
Times cited: 62
DOI: 10.1016/j.cplett.2008.07.082
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“Gas-phase loading of [Zn4O(btb)2] (MOF-177) with organometallic CVD-precursors: inclusion compounds of the type [LnM]a@MOF-177 and the formation of Cu and Pd nanoparticles inside MOF-177”. Müller M, Lebedev OI, Fischer RA, Journal of materials chemistry 18, 5274 (2008). http://doi.org/10.1039/b810989c
Abstract: The highly porous and desolvated (activated) coordination polymer [Zn4O(btb)2] (btb = benzene-1,3,5-tribenzoate; MOF-177) was loaded with the organometallic compounds [Cp2Fe], [Cp*2Zn], [Cu(OCHMeCH2NMe2)2], [CpCuL] (L = PMe3, CNtBu) and [CpPd(3-C3H5)] via solvent-free adsorption from the gas-phase. The inclusion compounds of the type [LnM]a@MOF-177, where [LnM] indicates the respective compound and the parameter a denotes the number of molecules per formula unit of the MOF-177, were characterised by elemental analysis, FT-IR, solid-state NMR spectroscopy and by powder X-ray diffraction (PXRD). Remarkably high effective loadings of up to 11 molecules [Cp2Fe] and 10 molecules [CpPd(3-C3H5)] per cavity were determined. The analytical data prove that the host lattice and the guest molecules interact only by weak van-der-Waals forces without any significant change of the framework or the chemical nature of the included molecules. Cu nanoparticles showing the typical surface plasmon resonance at 580 nm and Pd nanoparticles of about 2.6 nm in size were formed inside the cavities of MOF-177 by the thermally activated hydrogenolysis of the inclusion compounds [CpCuCNtBu]2@MOF-177 and by photolysis of [CpPd(3-C3H5)]10@MOF-177 in an inert atmosphere (Ar). PXRD, FT-IR and NMR studies revealed that the MOF-177 matrix remained unchanged during the decomposition process of the precursors. N2 adsorption studies of the obtained materials Cu@MOF-177 (e.g. 10.6 wt.% Cu, 2309 m2 g-1) and Pd@MOF-177 (e.g. 32.5 wt.%, 1063 m2 g-1) reveal high remaining specific surface areas (Langmuir model).
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Times cited: 65
DOI: 10.1039/b810989c
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“Fragmentation of an infinite ZnO2 square plane into discrete [ZnO2]2- linear units in the oxyselenide Ba2ZnO2Ag2Se2”. Herkelrath SJC, Saratovsky I, Hadermann J, Clarke SJ, Journal of the American Chemical Society 130, 14426 (2008). http://doi.org/10.1021/ja8063414
Abstract: Analysis of single crystal X-ray diffraction, neutron powder diffraction, electron diffraction and Zn−K-edge EXAFS data show that Ba2ZnO2Ag2Se2 contains unusual isolated [ZnO2]2− moieties resulting from fragmentation of a ZnO2 infinite plane placed under tension.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 13.858
Times cited: 13
DOI: 10.1021/ja8063414
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“Effects of lateral asymmetry on electronic structure of strained semiconductor nanorings in a magnetic field”. Milošević, MM, Tadić, M, Peeters FM, Nanotechnology 19 (2008). http://doi.org/10.1088/0957-4484/19/45/455401
Abstract: The influence of lateral asymmetry on the electronic structure and optical transitions in elliptical strained InAs nanorings is analyzed in the presence of a perpendicular magnetic field. Two-dimensional rings are assumed to have elliptical inner and outer boundaries oriented in mutually orthogonal directions. The influence of the eccentricity of the ring on the energy levels is analyzed. For large eccentricity of the ring, we do not find any AharonovBohm effect, in contrast to circular rings. Rather, the single-particle states of the electrons and the holes are localized as in two laterally coupled quantum dots formed in the lobes of the nanoring. Our work indicates that the control of shape is important for the existence of the AharonovBohm effect in semiconductor nanorings.
Keywords: A1 Journal article; Condensed Matter Theory (CMT)
Impact Factor: 3.44
Times cited: 11
DOI: 10.1088/0957-4484/19/45/455401
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“Acoustic vibration modes and electron-lattice coupling in self-assembled silver nanocolumns”. Burgin J, Langot P, Arbouet A, Margueritat J, Gonzalo J, Afonso CN, Vallee F, Mlayah A, Rossell MD, Van Tendeloo G, Nano letters 8, 1296 (2008). http://doi.org/10.1021/nl073123r
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 12.712
Times cited: 30
DOI: 10.1021/nl073123r
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“High harmonic generation from spin resonance fluorescence”. Nogaret A, Samardak A, Peeters F, Physica. E: Low-dimensional systems and nanostructures 40, 1223 (2008). http://doi.org/10.1016/j.physe.2007.08.038
Keywords: A1 Journal article; Condensed Matter Theory (CMT)
Impact Factor: 2.221
Times cited: 1
DOI: 10.1016/j.physe.2007.08.038
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“Magnetization of a superconducting film in a perpendicular magnetic field”. Doria MM, Brandt EH, Peeters FM, Physical review : B : solid state 78, 0544047 (2008). http://doi.org/10.1103/PhysRevB.78.054407
Abstract: With large thin superconducting films in a perpendicular magnetic field, the usual definition and calculation of the magnetization M via currents or as the difference of two fields fail, since the spatially averaged magnetic field in the film coincides with the uniform applied field and the demagnetization factor is unity. The definition of M as field-derivative of the free energy, however, still works in this limit. We generalize the virial theorem, previously derived for infinite bulk superconductors, to infinitely extended films of arbitrary thickness. An expression for M is obtained that indeed reproduces the M computed from the field derivative of the free energy.
Keywords: A1 Journal article; Condensed Matter Theory (CMT)
Impact Factor: 3.836
Times cited: 12
DOI: 10.1103/PhysRevB.78.054407
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“The martensitic phase transition in Ni-Al: experimental observation of excess entropy and heterogeneous spontaneous strain”. Zhang H, Salje EKH, Schryvers D, Bartova B, Journal of physics : condensed matter 20, 055220 (2008). http://doi.org/10.1088/0953-8984/20/5/055220
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.649
Times cited: 7
DOI: 10.1088/0953-8984/20/5/055220
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“Superconducting nanofilms: Andreev-type states induced by quantum confinement”. Shanenko AA, Croitoru MD, Peeters FM, Physical review : B : solid state 78, 054505 (2008). http://doi.org/10.1103/PhysRevB.78.054505
Abstract: Quantum confinement of the transverse electron motion is the major effect governing the superconducting properties of high-quality metallic nanofilms, leading to a nonuniform transverse distribution of the superconducting condensate. In this case the order parameter can exhibit significant local enhancements due to these quantum-size effects and, consequently, quasiparticles have lower energies when they avoid the local enhancements of the pair condensate. Such excitations can be considered as new Andreev-type quasiparticles but now induced by quantum confinement. By numerically solving the Bogoliubovde Gennes equations and using Anderson's approximate solution to these equations, we: (a) formulate a criterion for such new Andreev-type states (NATS) and (b) study their effect on the superconducting characteristics in metallic nanofilms. We also argue that nanofilms made of low-carrier-density materials, e.g., of superconducting semiconductors, can be a more optimal choice for the observations of NATS and other quantum-size superconducting effects.
Keywords: A1 Journal article; Condensed Matter Theory (CMT); Electron microscopy for materials research (EMAT)
Impact Factor: 3.836
Times cited: 14
DOI: 10.1103/PhysRevB.78.054505
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“Topologically trapped vortex molecules in Bose-Einstein condensates”. Geurts R, Milošević, MV, Peeters FM, Physical review : A : atomic, molecular and optical physics 78, 053610 (2008). http://doi.org/10.1103/PhysRevA.78.053610
Abstract: In a numerical experiment based on Gross-Pitaevskii formalism, we demonstrate unique topological quantum coherence in optically trapped Bose-Einstein condensates (BECs). Exploring the fact that vortices in a rotating BEC can be pinned by a geometric arrangement of laser beams, we show the parameter range in which vortex-antivortex molecules or multiquantum vortices are formed as a consequence of the optically imposed symmetry. Being low-energy states, we discuss the conditions for spontaneous nucleation of these unique molecules and their direct experimental observation, and provoke the potential use of the phase print of an antivortex or a multiquantum vortex when realized in unconventional circumstances.
Keywords: A1 Journal article; Condensed Matter Theory (CMT)
Impact Factor: 2.925
Times cited: 12
DOI: 10.1103/PhysRevA.78.053610
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“Unusual strain accommodation and conductivity enhancement by structure modulation variations in Sr4Fe6O12+\delta epitaxial films”. Solís C, Rossell MD, Garcia G, Van Tendeloo G, Santiso J, Advanced functional materials 18, 785 (2008). http://doi.org/10.1002/adfm.200701011
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 12.124
Times cited: 10
DOI: 10.1002/adfm.200701011
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“Vortex structure of few-electron quantum dots”. Anisimovas E, Tavernier MB, Peeters FM, Physica. E: Low-dimensional systems and nanostructures 40, 1621 (2008). http://doi.org/10.1016/j.physe.2007.10.031
Keywords: A1 Journal article; Condensed Matter Theory (CMT)
Impact Factor: 2.221
Times cited: 1
DOI: 10.1016/j.physe.2007.10.031
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“Removal of natural organic matter from water by using ion-exchange resins”. Kabsch-Korbutowicz M, Krupinska B, Przemysl chemiczny
T2 –, Scientific and Technical Conference on Water and Wastewater Basis for, Environmental Protection (School of Quality Water 2008), MAY 28-30, 2008, Kolobrzeg, POLAND 87, 473 (2008)
Abstract: Four aq. solns. contg. natural peat components and the water from Odra river were treated with 3 anion-exchange resins (2.5 to 15 cm(3) of resin per 1 dm(3) of the sample) for 5-60 min to remove the org. matter. The process efficiency was detd. by UV absorbance (254 nm) and colour intensity measurements. The treatment resulted in discoloration of the solns. A resin with weak alky, was the most efficient. The degree of removal increased with increasing the resin dose and contact time. The presence of inorg. anions in the soins. contributed to a decrease of process effectivity.
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
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“Fullerene-cubane : X-ray scattering experiments and Monte Carlo simulations”. Verberck B, Heresanu V, Rouziere S, Cambedouzou J, Launois P, Kovats E, Pekker S, Vliegenthart GA, Michel KH, Gompper G, Fullerenes, nanotubes, and carbon nanostructures
T2 –, 8th Biennial International Workshop on Fullerenes and Atomic Clusters, (IWFAC 2007), JUL 02-06, 2007, St Petersburg, RUSSIA 16, 293 (2008). http://doi.org/10.1080/15363830802205830
Abstract: We report single-crystal X-ray diffuse scattering measurements on C-60.C8H8 fullerene-cubane showing that the C-60 molecules are orientationally disordered at 300 and 150K and get ordered at low temperatures. Monte Carlo simulations provide further insight in the orientational behavior of both C-60 and C8H8 molecules; low-temperature molecular orientations are predicted.
Keywords: A1 Journal article; Engineering sciences. Technology; Condensed Matter Theory (CMT)
Impact Factor: 1.35
Times cited: 6
DOI: 10.1080/15363830802205830
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“A-site ordering and stripe phases in manganite films”. Sudheendra L, Moshnyaga V, Lebedev OI, Gehrke K, Belenciuc A, Shapoval O, Van Tendeloo G, Samwer K, Physica: B : condensed matter
T2 –, International Conference on Strongly Correlated Electron Systems (SCES, 2007), MAY 13-18, 2007, Houston, TX 403, 1645 (2008). http://doi.org/10.1016/j.physb.2007.10.332
Abstract: Insulating and metallic stripes above and below the Curie temperature, T-C, respectively, were observed by a high-resolution scanning tunneling microscopy (STM) and/or spectroscopy (STS) in A-site ordered and macroscopically strain free epitaxial La0.75Ca0.25MnO3 film grown on MgO substrate. The “insulating” stripes were found to be incommensurable to the lattice and aligned along (110) direction. Metallic stripes were commensurable with periodicity 2a(p)similar to 0.8 nm and aligned parallel to the crystallographic a/b-axis. Formation of these stripes involves competing charge, orbital, and lattice orders and is an outcome of an overlapping of electron wave functions mediated by the local lattice-strain distribution, existed even in A-site ordered film due to the difference in cation radii of La and Ca. (C) 2007 Elsevier B.V. All rights reserved.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 1.386
DOI: 10.1016/j.physb.2007.10.332
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“Control of surface plasmon localization via self-assembly of silver nanoparticles along silver nanowires”. Tran ML, Centeno SP, Hutchison JA, Engelkamp H, Liang D, Van Tendeloo G, Sels BF, Hofkens J, Uji-i H, Journal of the American Chemical Society 130, 17240 (2008). http://doi.org/10.1021/ja807218e
Abstract: A simple and low-cost method to create metal−metal hybrid nanostructures possessing fairly regularly spaced hot-spots of surface plasmon resonances is proposed. The nanohybrid structure was prepared via self-assembly during a simple drop-casting procedure, using chemically synthesized silver nanowires and silver nanoparticles prepared in a single batch of a polyol process. Wide field illumination of these nanohybrids produced hot-spots with spacings of around 500 nm to 1 ìm. The intensity of the emission/scattering from the hot-spots fluctuates over time. The proposed structure can be useful for the development of molecular-sensors or as a substrate for surface enhanced Raman/fluorescence spectroscopy.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 13.858
Times cited: 51
DOI: 10.1021/ja807218e
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“Chemistry and structure of anion-deficient perovskites with translational interfaces”. Abakumov AM, Hadermann J, Van Tendeloo G, Antipov EV, Journal of the American Ceramic Society 91, 1807 (2008). http://doi.org/10.1111/j.1551-2916.2008.02351.x
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.841
Times cited: 39
DOI: 10.1111/j.1551-2916.2008.02351.x
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“The effect of the dielectric mismatch on excitons and trions in freestanding nanowires”. Slachmuylders AF, Partoens B, Magnus W, Peeters FM, Physica. E: Low-dimensional systems and nanostructures 40, 2166 (2008). http://doi.org/10.1016/j.physe.2007.10.091
Keywords: A1 Journal article; Condensed Matter Theory (CMT)
Impact Factor: 2.221
Times cited: 3
DOI: 10.1016/j.physe.2007.10.091
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“First-principles study of doped Si and Ge nanowires”. Peelaers H, Partoens B, Peeters FM, Physica. E: Low-dimensional systems and nanostructures 40, 2169 (2008). http://doi.org/10.1016/j.physe.2007.10.090
Keywords: A1 Journal article; Condensed Matter Theory (CMT)
Impact Factor: 2.221
Times cited: 7
DOI: 10.1016/j.physe.2007.10.090
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“Long-range Coulomb repulsion effect on a charged vortex in high-temperature superconductors with competing d-wave and antiferromagnetic orders”. Zhao H-W, Zha G-Q, Zhou S-P, Peeters FM, Physical review : B : solid state 78, 064505 (2008). http://doi.org/10.1103/PhysRevB.78.064505
Abstract: Vortex charges in high-temperature superconductor (HTS) are studied by solving the Bogoliubovde Gennes equations based on a model Hamiltonian with antiferromagnetic (AF) and d-wave orders in the presence of the long-range Coulomb repulsion. For a sufficient strength of the AF order, the negative vortex charge is found. A sign change between negative and positive may occur by tuning the long-range Coulomb repulsion strength or the doping parameter. Recent NMR experiments are hopefully understood. We show that the charged vortex can induce a spin-orbit coupling that is important for superconductors with a short coherence length and a large value of the energy gap over the Fermi-level ratio. Fractional flux quanta are possible for HTS.
Keywords: A1 Journal article; Condensed Matter Theory (CMT)
Impact Factor: 3.836
Times cited: 12
DOI: 10.1103/PhysRevB.78.064505
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“Novel imaging techniques using computer methods for the evaluation of the upper airway in patients with sleep-disordered breathing: a comprehensive review”. de Backer JW, Vos WG, Verhulst SL, de Backer W, Sleep medicine reviews 12, 437 (2008). http://doi.org/10.1016/j.smrv.2008.07.009
Abstract: Patients with sleep related breathing disorders (SRBD) can be treated with nasal continuous positive airway pressure (nCPAP) or with several upper airway (UA) interventions. While nCPAP is almost always effective when clinically well tolerated, the therapeutic outcome of UA surgery and UA devices is difficult to predict. The improvement of our capability to perform the latter predictions more accurately is of great clinical importance since it will prevent patients to be treated with ineffective, sometimes irreversible, techniques. In this review we describe the importance of new imaging methods in this respect. We first refer to the most important pathophysiological mechanisms known so far to play a role in SRBD, indicating that functional imaging could elucidate these mechanisms in a patient specific manner. Then we describe the new technologies that make UA imaging more functional referring to the data as they are presently available. Finally we summarise the studies that do indicate that the use of functional imaging of the UA in SRBD patients may significantly help to predict the clinical outcome after UA interventions.
Keywords: A1 Journal article; Condensed Matter Theory (CMT); Laboratory Experimental Medicine and Pediatrics (LEMP)
Impact Factor: 8.958
Times cited: 33
DOI: 10.1016/j.smrv.2008.07.009
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“Simulation of an Ar/Cl2 inductively coupled plasma: study of the effect of bias, power and pressure and comparison with experiments”. Tinck S, Boullart W, Bogaerts A, Journal of physics: D: applied physics 41, 065207 (2008). http://doi.org/10.1088/0022-3727/41/6/065207
Abstract: A hybrid model, called the hybrid plasma equipment model, was used to study Ar/Cl(2) inductively coupled plasmas used for the etching of Si. The effects of substrate bias, source power and gas pressure on the plasma characteristics and on the fluxes and energies of plasma species bombarding the substrate were observed. A comparison with experimentally measured etch rates was made to investigate how the etch process is influenced and which plasma species mainly account for the etch process. First, the general plasma characteristics are investigated at the following operating conditions: 10% Ar 90% Cl(2) gas mixture, 5mTorr total gas pressure, 100 sccm gas flow rate, 250W source power, -200V dc bias at the substrate electrode and an operating frequency of 13.56MHz applied to the coil and to the substrate electrode. Subsequently, the pressure is varied from 5 to 80mTorr, the substrate bias from -100 to -300V and the source power from 250 to 1000W. Increasing the total gas pressure results in a decrease of the etch rate and a less anisotropic flux to the substrate due to more collisions of the ions in the sheath. Increasing the substrate bias has an effect on the energy of the ions bombarding the substrate and to a lesser extent on the magnitude of the ion flux. When source power is increased, it was found that, not the energy, but the magnitude of the ion flux is increased. The etch rate was more influenced by a variation of the substrate bias than by a variation of the source power, at these operating conditions. These results suggest that the etch process is mainly affected by the energy of the ions bombarding the substrate and the magnitude of the ion flux, and to a lesser extent by the magnitude of the radical flux.
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 2.588
Times cited: 31
DOI: 10.1088/0022-3727/41/6/065207
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