“Investigation of etching and deposition processes of Cl2/O2/Ar inductively coupled plasmas on silicon by means of plasmasurface simulations and experiments”. Tinck S, Boullart W, Bogaerts A, Journal of physics: D: applied physics 42, 095204 (2009). http://doi.org/10.1088/0022-3727/42/9/095204
Abstract: In this paper, a simulation method is described to predict the etching behaviour of Cl2/O2/Ar inductively coupled plasmas on a Si substrate, as used in shallow trench isolation for the production of electronic devices. The hybrid plasma equipment model (HPEM) developed by Kushner et al is applied to calculate the plasma characteristics in the reactor chamber and two additional Monte Carlo simulations are performed to predict the fluxes, angles and energy of the plasma species bombarding the Si substrate, as well as the resulting surface processes such as etching and deposition. The simulations are performed for a wide variety of operating conditions such as gas composition, chamber pressure, power deposition and substrate bias. It is predicted by the simulations that when the fraction of oxygen in the gas mixture is too high, the oxidation of the Si substrate is superior to the etching of Si by chlorine species, resulting in an etch rate close to zero as is also observed in the experiments.
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 2.588
Times cited: 23
DOI: 10.1088/0022-3727/42/9/095204
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“Investigation of laser output power saturation in the He-Cu+ IR hollow cathode discharge laser by experiments and numerical modeling”. Bogaerts A, Gijbels R, Grozeva M, Sabotinov N, Physica scripta T105, 90 (2003). http://doi.org/10.1238/Physica.Topical.105a00090
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 1.28
DOI: 10.1238/Physica.Topical.105a00090
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“Investigation of the electron distribution functions in low pressure electron cyclotron resonance discharges”. Kaganovich I, Misina M, Bogaerts A, Gijbels R Kluwer Academic, Dordrecht, page 543 (1999).
Keywords: H1 Book chapter; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
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“The ion- and atom-induced secondary electron emission yield: numerical study for the effect of clean and dirty cathode surfaces”. Bogaerts A, Gijbels R, Plasma sources science and technology 11, 27 (2002). http://doi.org/10.1088/0963-0252/11/1/303
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 3.302
Times cited: 51
DOI: 10.1088/0963-0252/11/1/303
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“Ion-bombardment artifact in TOF-SIMS analysis of ZrO2/SiO2/Si stacks”. de Witte H, Conard T, Vandervorst W, Gijbels R, Applied surface science 203, 523 (2003). http://doi.org/10.1016/S0169-4332(02)00728-6
Abstract: We analyzed ultra-thin ZrO2/SiO2/Si gate dielectrics under post-deposition anneals in dry O-2 at temperatures from 500 to 700 degreesC. TOF-SIMS profiling of ZrO2/SiO2/Si stacks is hampered by many sputter induced artifacts. The depletion of oxygen leads to a decrease in SIMS intensities. However, preferential sputtering is accompanied by transport of the depleted species towards the surface. Due to recoil implantation oxygen gets piled-up near the ZrO2/SiO2 interface. Either normal or radiation-enhanced diffusion transports oxygen back to the surface. Simultaneously also segregation of zirconium towards and through the interface is observed, resulting in a large zirconium tail in the underlying silicon substrate. (C) 2002 Elsevier Science B.V. All rights reserved.
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 3.387
Times cited: 15
DOI: 10.1016/S0169-4332(02)00728-6
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“Ion irradiation for improved graphene network formation in carbon nanotube growth”. Neyts EC, Bogaerts A, Carbon 77, 790 (2014). http://doi.org/10.1016/j.carbon.2014.05.083
Abstract: Ion irradiation of carbon nanotubes very often leads to defect formation. However, we have recently shown that Ar ion irradiation in a limited energy window of 1025 eV may enhance the initial cap nucleation process, when the carbon network is in contact with the metal nanocatalyst. Here, we employ reactive molecular dynamics simulations to demonstrate that ion irradiation in a higher energy window of 1035 eV may also heal network defects after the nucleation stage through a non-metal-mediated mechanism, when the carbon network is no longer in contact with the metal nanocatalyst. The results demonstrate the possibility of beneficially utilizing ions in e.g. plasma-enhanced chemical vapour deposition of carbon nanotubes.
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 6.337
Times cited: 7
DOI: 10.1016/j.carbon.2014.05.083
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“Ion microprobe analysis of rock-forming minerals from the Carnmenellis granite”. Goossens D, Van 't dack L, Gijbels R, (1989)
Keywords: P3 Proceeding; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
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“Ionization density in hydrocarbon flames: numerical modelling”. Migoun A, Cenian A, Chernukho A, Bogaerts A, Gijbels R, Leys C, , 130 (2004)
Keywords: P3 Proceeding; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
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“Langmuir probe diagnostic of high pressure plasmas: study by PIC-MC modelling”. Cenian A, Chernukho A, Bogaerts A, Gijbels R, Leys C, , 61 (2004)
Keywords: P3 Proceeding; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
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“Laser ablation for analytical sampling: what can we learn from modeling?”.Bogaerts A, Chen Z, Gijbels R, Vertes A, Spectrochimica acta: part B : atomic spectroscopy 58, 1867 (2003). http://doi.org/10.1016/j.sab.2003.08.004
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 3.241
Times cited: 321
DOI: 10.1016/j.sab.2003.08.004
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“Laser ablation of copper in different background gases: comparative study by numerical modeling and experiments”. Bogaerts A, Chen Z, Bleiner D, Journal of analytical atomic spectrometry 21, 384 (2006). http://doi.org/10.1039/b514313f
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 3.379
Times cited: 67
DOI: 10.1039/b514313f
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“Laser ablation of Cu and plume expansion into 1 atm ambient gas”. Chen Z, Bogaerts A, Journal of applied physics 97, 063305 (2005). http://doi.org/10.1063/1.1863419
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 2.068
Times cited: 131
DOI: 10.1063/1.1863419
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Vertes A, Gijbels R, Adams F (1993) Laser ionization mass analysis. Wiley, New York
Keywords: ME1 Book as editor or co-editor; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
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“Laser ionization mass spectrometry for the characterization of solid materials”. van Vaeck L, van Roy W, Gijbels R, Analusis : chimie analytique, méthodes physiques d'analyse, composition de la matière 21, 53 (1993)
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Times cited: 10
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“Laser microprobe Fourier transform mass spectrometer with external ion source for organic and inorganic microanalysis”. Struyf H, van Roy W, van Vaeck L, Gijbels R, Caravatti P San Francisco Press, San Francisco, Calif., page 595 (1993).
Keywords: H3 Book chapter; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
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“Laser microprobe Fourier transform mass spectrometer with external ion source for organic and inorganic microanalysis”. Struyf H, van Roy W, van Vaeck L, van Grieken R, Gijbels R, Caravatti P, Analytica chimica acta 283, 139 (1993). http://doi.org/10.1016/0003-2670(93)85216-7
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT); AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
Impact Factor: 4.513
Times cited: 17
DOI: 10.1016/0003-2670(93)85216-7
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“Laser microprobe mass spectrometry in biology and biomedicine”. Eeckhaoudt S, van Vaeck L, Gijbels R, van Grieken RE, Scanning microscopy S8, 335 (1994)
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT); AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
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“Laser microprobe mass spectrometry: local surface analysis of organic and inorganic compounds”. van Vaeck L, van Roy W, Struyf H, Poels K, Gijbels R Vch, Weinheim, page 354 (1997).
Keywords: H3 Book chapter; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
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“Laser microprobe mass spectrometry of quaternary phosphonium salts: direct versus matrix-assisted laser desorption”. Claereboudt J, Claeys M, Geise H, Gijbels R, Vertes A, Journal of the American Society for Mass Spectrometry 4, 798 (1993). http://doi.org/10.1016/1044-0305(93)80038-Z
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 2.945
Times cited: 17
DOI: 10.1016/1044-0305(93)80038-Z
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“Laser microprobe mass spectrometry: principle and applications in biology and medicine”. van Vaeck L, Poels K, de Nollin S, Hachimi A, Gijbels R, Cell biology international 21, 635 (1997). http://doi.org/10.1006/cbir.1997.0198
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 1.831
Times cited: 6
DOI: 10.1006/cbir.1997.0198
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“Lasers in mass spectrometry: organic and inorganic instrumentation”. van Vaeck L, van Roy W, Gijbels R, Adams F Wiley, New York, page 7 (1993).
Keywords: H3 Book chapter; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
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“Local and fast relaxation phenomena after laser-induced photodetachment in a strongly electronegative rf discharge”. Yan M, Bogaerts A, Gijbels R, Goedheer WJ, Physical review : E : statistical, nonlinear, and soft matter physics 65, 016408 (2002). http://doi.org/10.1103/PhysRevE.65.016408
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 2.366
Times cited: 2
DOI: 10.1103/PhysRevE.65.016408
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“Longitudinal hollow cathode copper ion laser: optimization of excitation and geometry”. Mihailova D, Grozeva M, Bogaerts A, Gijbels R, Sabotinov N, , 49 (2003)
Keywords: P3 Proceeding; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
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“The many faces of TOF-SIMS for the characterization of solid (sub)surfaces”. Gijbels R, , 101 (2003)
Keywords: P3 Proceeding; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
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“Mass spectrometric analysis of inorganic solids: GDMS and other methods”. Gijbels R, van Straaten M, Bogaerts A, Advances in mass spectrometry 13, 241 (1995)
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Times cited: 12
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“A mass spectrometric study of the dissolution behavior of sanidine”. Adriaens A, Van 't dack L, Adams F, Gijbels R, Microchimica acta 120, 139 (1995). http://doi.org/10.1007/BF01244427
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 3.741
Times cited: 1
DOI: 10.1007/BF01244427
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“Mass spectrometry, inorganic”. Adams F, Gijbels R, Jambers W, van Grieken R Wiley, Chichester, page 2650 (1998).
Keywords: H3 Book chapter; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT); AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
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“Mathematical description of a direct current glow discharge in argon”. Bogaerts A, Gijbels R, Fresenius' journal of analytical chemistry 355, 853 (1996)
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Times cited: 12
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Bogaerts A (1996) Mathematical modeling of a direct current glow discharge in argon. Universitaire Instelling Antwerpen, Antwerpen
Keywords: Doctoral thesis; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
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“Mathematical modelling of an analytical glow discharge”. Bogaerts A, van Straaten M, Gijbels R KD Marketing Services, Milton Keynes, page 82 (1995).
Keywords: H3 Book chapter; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
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