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Author | Neyts, E.; Yan, M.; Bogaerts, A.; Gijbels, R. | ||||
Title | PIC-MC simulation of an RF capacitively coupled Ar/H2 discharge | Type | A1 Journal article | ||
Year | 2003 | Publication | Nuclear instruments and methods in physics research: B | Abbreviated Journal | Nucl Instrum Meth B |
Volume | 202 | Issue | Pages | 300-304 | |
Keywords | A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) | ||||
Abstract | |||||
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Corporate Author | Thesis | ||||
Publisher | Place of Publication | Editor | |||
Language | Wos | 000182122500048 | Publication Date | 2003-03-26 | |
Series Editor | Series Title | Abbreviated Series Title | |||
Series Volume | Series Issue | Edition | |||
ISSN | 0168-583X; | ISBN | Additional Links | UA library record; WoS full record; WoS citing articles | |
Impact Factor | 1.109 | Times cited | 8 | Open Access | |
Notes | Approved | Most recent IF: 1.109; 2003 IF: 1.041 | |||
Call Number | UA @ lucian @ c:irua:44015 | Serial | 2620 | ||
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