| |
Records |
|
Author |
Bogaerts, A.; Aghaei, M. |
| |
Title |
What modeling reveals about the properties of an inductively coupled plasma |
Type |
A1 Journal article |
| |
Year |
2016 |
Publication |
Spectroscopy |
Abbreviated Journal |
Spectroscopy-Us |
| |
Volume |
31 |
Issue |
1 |
Pages |
52-59 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
To get better performance from inductively coupled plasma (ICP)-based methods, it is informative to study the properties of the ICP under different conditions. Annemie Bogaerts and Maryam Aghaei at the University of Antwerp, Belgium, are using computational modeling to examine how various properties of the ICP, such as gas flow path lines and velocity, temperature changes, and ionization effects, are affected by numerous factors, such as the gas flow rates of injector and auxiliary gas, applied power, and even the very presence of a mass spectrometry (MS) sampler. They have also applied their models to study particle transport through the ICP. Using their developed model, it is now possible to predict optimum conditions for specific analyses. Bogaerts and Aghaei spoke to us about this work. |
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Address |
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Corporate Author |
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Thesis |
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Publisher |
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Place of Publication |
Springfield, Or. |
Editor |
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| |
Language |
|
Wos |
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Publication Date |
|
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
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| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN  |
0887-6703 |
ISBN |
|
Additional Links |
UA library record; WoS full record |
| |
Impact Factor |
0.466 |
Times cited |
|
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 0.466 |
| |
Call Number |
UA @ lucian @ c:irua:131601 |
Serial |
4278 |
| Permanent link to this record |
| |
|
| |
|
Author |
Kolev, I.; Bogaerts, A. |
| |
Title |
Numerical models of the planar magnetron glow discharges |
Type |
A1 Journal article |
| |
Year |
2004 |
Publication |
Contributions to plasma physics |
Abbreviated Journal |
Contrib Plasm Phys |
| |
Volume |
44 |
Issue |
7/8 |
Pages |
582-588 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
|
| |
Address |
|
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Corporate Author |
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Thesis |
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| |
Publisher |
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Place of Publication |
Berlin |
Editor |
|
| |
Language |
|
Wos |
000225541000003 |
Publication Date |
2004-11-12 |
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0863-1042;1521-3986; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
1.44 |
Times cited |
22 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 1.44; 2004 IF: 0.701 |
| |
Call Number |
UA @ lucian @ c:irua:49069 |
Serial |
2402 |
| Permanent link to this record |
| |
|
| |
|
Author |
Neyts, E.; Eckert, M.; Mao, M.; Bogaerts, A. |
| |
Title |
Numerical simulation of hydrocarbon plasmas for nanoparticle formation and the growth of nanostructured thin films |
Type |
A1 Journal article |
| |
Year |
2009 |
Publication |
Plasma physics and controlled fusion |
Abbreviated Journal |
Plasma Phys Contr F |
| |
Volume |
51 |
Issue |
|
Pages |
124034,1-124034,8 |
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Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
This paper outlines two different numerical simulation approaches, carried out by our group, used for describing hydrocarbon plasmas in their applications for either nanoparticle formation in the plasma or the growth of nanostructured thin films, such as nanocrystalline diamond (NCD). A plasma model based on the fluid approach is utilized to study the initial mechanisms giving rise to nanoparticle formation in an acetylene plasma. The growth of NCD is investigated by molecular dynamics simulations, describing the interaction of the hydrocarbon species with a substrate. |
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Address |
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Corporate Author |
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Thesis |
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| |
Publisher |
|
Place of Publication |
Oxford |
Editor |
|
| |
Language |
|
Wos |
000271940800045 |
Publication Date |
2009-11-12 |
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Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0741-3335;1361-6587; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
2.392 |
Times cited |
2 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 2.392; 2009 IF: 2.409 |
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Call Number |
UA @ lucian @ c:irua:79132 |
Serial |
2405 |
| Permanent link to this record |
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| |
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Author |
Liu, Y.-X.; Zhang, Y.-R.; Bogaerts, A.; Wang, Y.-N. |
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Title |
Electromagnetic effects in high-frequency large-area capacitive discharges : a review |
Type |
A1 Journal article |
| |
Year |
2015 |
Publication |
Journal of vacuum science and technology: A: vacuum surfaces and films |
Abbreviated Journal |
J Vac Sci Technol A |
| |
Volume |
33 |
Issue |
33 |
Pages |
020801 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
In traditional capacitively coupled plasmas, the discharge can be described by an electrostatic model, in which the Poisson equation is employed to determine the electrostatic electric field. However, current plasma reactors are much larger and driven at a much higher frequency. If the excitation wavelength k in the plasma becomes comparable to the electrode radius, and the plasma skin depth d becomes comparable to the electrode spacing, the electromagnetic (EM) effects will become significant and compromise the plasma uniformity. In this regime, capacitive discharges have to be described by an EM model, i.e., the full set of Maxwells equations should be solved to address the EM effects. This paper gives an overview of the theory, simulation and experiments that have recently been carried out to understand these effects, which cause major uniformity problems in plasma processing for microelectronics and flat panel display industries. Furthermore, some methods for improving the plasma uniformity are also described and compared. |
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Address |
|
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Corporate Author |
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Thesis |
|
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Publisher |
A v s amer inst physics |
Place of Publication |
Melville |
Editor |
|
| |
Language |
|
Wos |
000355739500007 |
Publication Date |
2015-02-12 |
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Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
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Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0734-2101;1520-8559; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
1.374 |
Times cited |
10 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 1.374; 2015 IF: 2.322 |
| |
Call Number |
c:irua:123541 |
Serial |
903 |
| Permanent link to this record |
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| |
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Author |
Zhang, Y.-R.; Gao, F.; Li, X.-C.; Bogaerts, A.; Wang, Y.-N. |
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Title |
Fluid simulation of the bias effect in inductive/capacitive discharges |
Type |
A1 Journal article |
| |
Year |
2015 |
Publication |
Journal of vacuum science and technology: A: vacuum surfaces and films |
Abbreviated Journal |
J Vac Sci Technol A |
| |
Volume |
33 |
Issue |
33 |
Pages |
061303 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
Computer simulations are performed for an argon inductively coupled plasma (ICP) with a capacitive radio-frequency bias power, to investigate the bias effect on the discharge mode transition and on the plasma characteristics at various ICP currents, bias voltages, and bias frequencies. When the bias frequency is fixed at 13.56 MHz and the ICP current is low, e.g., 6A, the spatiotemporal averaged plasma density increases monotonically with bias voltage, and the bias effect is already prominent at a bias voltage of 90 V. The maximum of the ionization rate moves toward the bottom electrode, which indicates clearly the discharge mode transition in inductive/capacitive discharges. At higher ICP currents, i.e., 11 and 13 A, the plasma density decreases first and then increases with bias voltage, due to the competing mechanisms between the ion acceleration power dissipation and the capacitive power deposition. At 11 A, the bias effect is still important, but it is noticeable only at higher bias voltages. At 13 A, the ionization rate is characterized by a maximum at the reactor center near the dielectric window at all selected bias voltages, which indicates that the ICP power, instead of the bias power, plays a dominant role under this condition, and no mode transition is observed. Indeed, the ratio of the bias power to the total power is lower than 0.4 over a wide range of bias voltages, i.e., 0300V. Besides the effect of ICP current, also the effect of various bias frequencies is investigated. It is found that the modulation of the bias power to the spatiotemporal distributions of the ionization rate at 2MHz is strikingly different from the behavior observed at higher bias frequencies. Furthermore, the minimum of the plasma density appears at different bias voltages, i.e., 120V at 2MHz and 90V at 27.12 MHz. |
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Address |
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Corporate Author |
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Thesis |
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Publisher |
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Place of Publication |
|
Editor |
|
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Language |
|
Wos |
000365503800020 |
Publication Date |
2015-08-07 |
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Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0734-2101;1520-8559; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
1.374 |
Times cited |
9 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 1.374; 2015 IF: 2.322 |
| |
Call Number |
c:irua:126824 |
Serial |
1229 |
| Permanent link to this record |
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|
| |
|
Author |
Zhang, Y.-R.; Tinck, S.; De Schepper, P.; Wang, Y.-N.; Bogaerts, A. |
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Title |
Modeling and experimental investigation of the plasma uniformity in CF4/O2 capacitively coupled plasmas, operating in single frequency and dual frequency regime |
Type |
A1 Journal article |
| |
Year |
2015 |
Publication |
Journal of vacuum science and technology: A: vacuum surfaces and films |
Abbreviated Journal |
J Vac Sci Technol A |
| |
Volume |
33 |
Issue |
33 |
Pages |
021310 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
A two-dimensional hybrid Monte Carlofluid model, incorporating a full-wave solution of Maxwell's equations, is employed to describe the behavior of high frequency (HF) and very high frequency capacitively coupled plasmas (CCPs), operating both at single frequency (SF) and dual frequency (DF) in a CF4/O2 gas mixture. First, the authors investigate the plasma composition, and the simulations reveal that besides CF4 and O2, also COF2, CF3, and CO2 are important neutral species, and CF+3 and F− are the most important positive and negative ions. Second, by comparing the results of the model with and without taking into account the electromagnetic effects for a SF CCP, it is clear that the electromagnetic effects are important, both at 27 and 60 MHz, because they affect the absolute values of the calculation results and also (to some extent) the spatial profiles, which accordingly affects the uniformity in plasma processing. In order to improve the plasma radial uniformity, which is important for the etch process, a low frequency (LF) source is added to the discharge. Therefore, in the major part of the paper, the plasma uniformity is investigated for both SF and DF CCPs, operating at a HF of 27 and 60 MHz and a LF of 2 MHz. For this purpose, the authors measure the etch rates as a function of position on the wafer in a wide range of LF powers, and the authors compare them with the calculated fluxes toward the wafer of the plasma species playing a role in the etch process, to explain the trends in the measured etch rate profiles. It is found that at a HF of 60 MHz, the uniformity of the etch rate is effectively improved by adding a LF power of 2 MHz and 300 W, while its absolute value increases by about 50%, thus a high etch rate with a uniform distribution is observed under this condition. |
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Address |
|
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Corporate Author |
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Thesis |
|
| |
Publisher |
|
Place of Publication |
New York, N.Y. |
Editor |
|
| |
Language |
|
Wos |
000355739500026 |
Publication Date |
2015-01-29 |
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Series Editor |
|
Series Title |
|
Abbreviated Series Title |
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Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0734-2101;1520-8559; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
1.374 |
Times cited |
3 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 1.374; 2015 IF: 2.322 |
| |
Call Number |
c:irua:122650 |
Serial |
2107 |
| Permanent link to this record |
| |
|
| |
|
Author |
Bogaerts, A.; Naylor, J.; Hatcher, M.; Jones, W.J.; Mason, R. |
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Title |
Influence of sticking coefficients on the behavior of sputtered atoms in an argon glow discharge: modeling and comparison with experiment |
Type |
A1 Journal article |
| |
Year |
1998 |
Publication |
Journal of vacuum science and technology: A: vacuum surfaces and films |
Abbreviated Journal |
J Vac Sci Technol A |
| |
Volume |
16 |
Issue |
4 |
Pages |
2400-2410 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
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Abstract |
|
| |
Address |
|
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Corporate Author |
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Thesis |
|
| |
Publisher |
|
Place of Publication |
New York, N.Y. |
Editor |
|
| |
Language |
|
Wos |
000074852700061 |
Publication Date |
2002-07-27 |
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Series Editor |
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Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0734-2101; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
1.374 |
Times cited |
12 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 1.374; 1998 IF: 1.612 |
| |
Call Number |
UA @ lucian @ c:irua:24124 |
Serial |
1634 |
| Permanent link to this record |
| |
|
| |
|
Author |
Depla, D.; Chen, Z.Y.; Bogaerts, A.; Ignatova, V.; de Gryse, R.; Gijbels, R. |
| |
Title |
Modeling of the target surface modification by reactive ion implantation during magnetron sputtering |
Type |
A1 Journal article |
| |
Year |
2004 |
Publication |
Journal of vacuum science and technology: A: vacuum surfaces and films |
Abbreviated Journal |
J Vac Sci Technol A |
| |
Volume |
22 |
Issue |
4 |
Pages |
1524-1529 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
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Abstract |
|
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Address |
|
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Corporate Author |
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Thesis |
|
| |
Publisher |
|
Place of Publication |
New York, N.Y. |
Editor |
|
| |
Language |
|
Wos |
000223322000075 |
Publication Date |
2004-07-27 |
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Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
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Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0734-2101; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
1.374 |
Times cited |
13 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 1.374; 2004 IF: 1.557 |
| |
Call Number |
UA @ lucian @ c:irua:47331 |
Serial |
2137 |
| Permanent link to this record |
| |
|
| |
|
Author |
Bogaerts, A.; Gijbels, R. |
| |
Title |
Calculation of crater profiles on a flat cathode in a direct current glow discharge, and comparison with experiment |
Type |
A1 Journal article |
| |
Year |
1997 |
Publication |
Spectrochimica acta: part B : atomic spectroscopy |
Abbreviated Journal |
Spectrochim Acta B |
| |
Volume |
52 |
Issue |
6 |
Pages |
765-778 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
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Abstract |
|
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Address |
|
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Corporate Author |
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Thesis |
|
| |
Publisher |
|
Place of Publication |
Oxford |
Editor |
|
| |
Language |
|
Wos |
A1997XH34900009 |
Publication Date |
0000-00-00 |
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0584-8547; 0038-6987 |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
3.241 |
Times cited |
42 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 3.241; 1997 IF: 2.448 |
| |
Call Number |
UA @ lucian @ c:irua:19603 |
Serial |
265 |
| Permanent link to this record |
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|
| |
|
Author |
Bogaerts, A.; Gijbels, R. |
| |
Title |
Comparison of argon and neon as discharge gases in a direct current glow discharge: a mathematical simulation |
Type |
A1 Journal article |
| |
Year |
1997 |
Publication |
Spectrochimica acta: part B : atomic spectroscopy |
Abbreviated Journal |
Spectrochim Acta B |
| |
Volume |
52 |
Issue |
5 |
Pages |
553-566 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
|
| |
Address |
|
| |
Corporate Author |
|
Thesis |
|
| |
Publisher |
|
Place of Publication |
Oxford |
Editor |
|
| |
Language |
|
Wos |
A1997XG74100002 |
Publication Date |
0000-00-00 |
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0584-8547; 0038-6987 |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
3.241 |
Times cited |
13 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 3.241; 1997 IF: 2.448 |
| |
Call Number |
UA @ lucian @ c:irua:19601 |
Serial |
426 |
| Permanent link to this record |
| |
|
| |
|
Author |
Bogaerts, A.; Wagner, E.; Smith, B.W.; Winefordner, J.D.; Pollmann, D.; Harrison, W.W.; Gijbels, R. |
| |
Title |
Three-dimensional density profiles of sputtered atoms and ions in a direct current glow discharge: experimental study and comparison with calculations |
Type |
A1 Journal article |
| |
Year |
1997 |
Publication |
Spectrochimica acta: part B : atomic spectroscopy |
Abbreviated Journal |
Spectrochim Acta B |
| |
Volume |
52 |
Issue |
2 |
Pages |
205-218 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
|
| |
Address |
|
| |
Corporate Author |
|
Thesis |
|
| |
Publisher |
|
Place of Publication |
Oxford |
Editor |
|
| |
Language |
|
Wos |
A1997WR97300006 |
Publication Date |
0000-00-00 |
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0584-8547; 0038-6987 |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
3.241 |
Times cited |
46 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 3.241; 1997 IF: 2.448 |
| |
Call Number |
UA @ lucian @ c:irua:19594 |
Serial |
3648 |
| Permanent link to this record |
| |
|
| |
|
Author |
Bogaerts, A.; Guenard, R.D.; Smith, B.W.; Winefordner, J.D.; Harrison, W.W.; Gijbels, R. |
| |
Title |
Three-dimensional density profiles of the argon metastable atoms in a direct current glow discharge: experimental study and comparison with calculations |
Type |
A1 Journal article |
| |
Year |
1997 |
Publication |
Spectrochimica acta: part B : atomic spectroscopy |
Abbreviated Journal |
Spectrochim Acta B |
| |
Volume |
52 |
Issue |
2 |
Pages |
219-229 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
|
| |
Address |
|
| |
Corporate Author |
|
Thesis |
|
| |
Publisher |
|
Place of Publication |
Oxford |
Editor |
|
| |
Language |
|
Wos |
A1997WR97300007 |
Publication Date |
0000-00-00 |
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0584-8547; 0038-6987 |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
3.241 |
Times cited |
36 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 3.241; 1997 IF: 2.448 |
| |
Call Number |
UA @ lucian @ c:irua:19598 |
Serial |
3649 |
| Permanent link to this record |
| |
|
| |
|
Author |
Bogaerts, A.; Gijbels, R. |
| |
Title |
Behavior of the sputtered copper atoms, ions and excited species in a radio-frequency and direct current glow discharge |
Type |
A1 Journal article |
| |
Year |
2000 |
Publication |
Spectrochimica acta: part B : atomic spectroscopy |
Abbreviated Journal |
Spectrochim Acta B |
| |
Volume |
55 |
Issue |
|
Pages |
279-297 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
|
| |
Address |
|
| |
Corporate Author |
|
Thesis |
|
| |
Publisher |
|
Place of Publication |
Oxford |
Editor |
|
| |
Language |
|
Wos |
000086340100006 |
Publication Date |
2002-07-26 |
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0584-8547; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
3.241 |
Times cited |
17 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 3.241; 2000 IF: 2.608 |
| |
Call Number |
UA @ lucian @ c:irua:28325 |
Serial |
226 |
| Permanent link to this record |
| |
|
| |
|
Author |
Bogaerts, A.; Temelkov, K.A.; Vuchkov, N.K.; Gijbels, R. |
| |
Title |
Calculation of rate constants for asymmetric charge transfer, and their effect on relative sensitivity factors in glow discharge mass spectrometry |
Type |
A1 Journal article |
| |
Year |
2007 |
Publication |
Spectrochimica acta: part B : atomic spectroscopy |
Abbreviated Journal |
Spectrochim Acta B |
| |
Volume |
62 |
Issue |
4 |
Pages |
325-336 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
|
| |
Address |
|
| |
Corporate Author |
|
Thesis |
|
| |
Publisher |
|
Place of Publication |
Oxford |
Editor |
|
| |
Language |
|
Wos |
000247551800001 |
Publication Date |
2007-03-25 |
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0584-8547; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
3.241 |
Times cited |
28 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 3.241; 2007 IF: 2.957 |
| |
Call Number |
UA @ lucian @ c:irua:64329 |
Serial |
269 |
| Permanent link to this record |
| |
|
| |
|
Author |
Bogaerts, A.; Gijbels, R.; Carman, R.J. |
| |
Title |
Collisional-radiative model for the sputtered copper atoms and ions in a direct current argon glow discharge |
Type |
A1 Journal article |
| |
Year |
1998 |
Publication |
Spectrochimica acta: part B : atomic spectroscopy |
Abbreviated Journal |
Spectrochim Acta B |
| |
Volume |
53 |
Issue |
|
Pages |
1679-1703 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
|
| |
Address |
|
| |
Corporate Author |
|
Thesis |
|
| |
Publisher |
|
Place of Publication |
Oxford |
Editor |
|
| |
Language |
|
Wos |
000078046700005 |
Publication Date |
2002-07-26 |
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0584-8547; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
3.241 |
Times cited |
71 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 3.241; 1998 IF: 2.758 |
| |
Call Number |
UA @ lucian @ c:irua:24126 |
Serial |
388 |
| Permanent link to this record |
| |
|
| |
|
Author |
Bogaerts, A.; Janssens, K.; van Grieken, R. |
| |
Title |
Colloquium Spectroscopicum Internationale 34, Antwerp (Belgium), 4-9 September 2005: preface |
Type |
Editorial |
| |
Year |
2006 |
Publication |
Spectrochimica acta: part B : atomic spectroscopy |
Abbreviated Journal |
Spectrochim Acta B |
| |
Volume |
61 |
Issue |
4 |
Pages |
373-374 |
| |
Keywords |
Editorial; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation); Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
|
| |
Address |
|
| |
Corporate Author |
|
Thesis |
|
| |
Publisher |
|
Place of Publication |
Oxford |
Editor |
|
| |
Language |
|
Wos |
000238887600001 |
Publication Date |
2006-06-13 |
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0584-8547; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
3.241 |
Times cited |
2 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 3.241; 2006 IF: 3.092 |
| |
Call Number |
UA @ lucian @ c:irua:58859 |
Serial |
393 |
| Permanent link to this record |
| |
|
| |
|
Author |
Bogaerts, A.; Gijbels, R.; Goedheer, W. |
| |
Title |
Comparison between a radio-frequency and direct current glow discharge in argon by a hybrid Monte Carlo-fluid model for electrons, argon ions and fast argon atoms |
Type |
A1 Journal article |
| |
Year |
1999 |
Publication |
Spectrochimica acta: part B : atomic spectroscopy |
Abbreviated Journal |
Spectrochim Acta B |
| |
Volume |
54 |
Issue |
9 |
Pages |
1335-1350 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
|
| |
Address |
|
| |
Corporate Author |
|
Thesis |
|
| |
Publisher |
|
Place of Publication |
Oxford |
Editor |
|
| |
Language |
|
Wos |
000082537900007 |
Publication Date |
2002-07-25 |
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0584-8547; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
3.241 |
Times cited |
11 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 3.241; 1999 IF: 2.421 |
| |
Call Number |
UA @ lucian @ c:irua:24924 |
Serial |
424 |
| Permanent link to this record |
| |
|
| |
|
Author |
Bogaerts, A.; Donko, Z.; Kutasi, K.; Bano, G.; Pinhao, N.; Pinheiro, M. |
| |
Title |
Comparison of calculated and measured optical emission intensities in a direct current argon-copper glow discharge |
Type |
A1 Journal article |
| |
Year |
2000 |
Publication |
Spectrochimica acta: part B : atomic spectroscopy |
Abbreviated Journal |
Spectrochim Acta B |
| |
Volume |
55 |
Issue |
|
Pages |
1465-1479 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
|
| |
Address |
|
| |
Corporate Author |
|
Thesis |
|
| |
Publisher |
|
Place of Publication |
Oxford |
Editor |
|
| |
Language |
|
Wos |
000089748400007 |
Publication Date |
2002-07-25 |
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0584-8547; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
3.241 |
Times cited |
33 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 3.241; 2000 IF: 2.608 |
| |
Call Number |
UA @ lucian @ c:irua:34144 |
Serial |
428 |
| Permanent link to this record |
| |
|
| |
|
Author |
Bogaerts, A.; Wilken, L.; Hoffmann, V.; Gijbels, R.; Wetzig, K. |
| |
Title |
Comparison of modeling calculations with experimental results for direct current glow discharge optical emission spectrometry |
Type |
A1 Journal article |
| |
Year |
2001 |
Publication |
Spectrochimica acta: part B : atomic spectroscopy |
Abbreviated Journal |
Spectrochim Acta B |
| |
Volume |
56 |
Issue |
|
Pages |
551-564 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
|
| |
Address |
|
| |
Corporate Author |
|
Thesis |
|
| |
Publisher |
|
Place of Publication |
Oxford |
Editor |
|
| |
Language |
|
Wos |
000169972200007 |
Publication Date |
2002-07-25 |
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0584-8547; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
3.241 |
Times cited |
16 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 3.241; 2001 IF: 2.172 |
| |
Call Number |
UA @ lucian @ c:irua:34140 |
Serial |
430 |
| Permanent link to this record |
| |
|
| |
|
Author |
Bogaerts, A.; Wilken, L.; Hoffmann, V.; Gijbels, R.; Wetzig, K. |
| |
Title |
Comparison of modeling calculations with experimental results for rf glow discharge optical emission spectrometry |
Type |
A1 Journal article |
| |
Year |
2002 |
Publication |
Spectrochimica acta: part B : atomic spectroscopy |
Abbreviated Journal |
Spectrochim Acta B |
| |
Volume |
57 |
Issue |
|
Pages |
109-119 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
|
| |
Address |
|
| |
Corporate Author |
|
Thesis |
|
| |
Publisher |
|
Place of Publication |
Oxford |
Editor |
|
| |
Language |
|
Wos |
000173505300010 |
Publication Date |
2002-10-15 |
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0584-8547; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
3.241 |
Times cited |
14 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 3.241; 2002 IF: 2.695 |
| |
Call Number |
UA @ lucian @ c:irua:40178 |
Serial |
431 |
| Permanent link to this record |
| |
|
| |
|
Author |
Bogaerts, A.; Gijbels, R. |
| |
Title |
Comprehensive description of a Grimm-type glow discharge source used for optical emission spectrometry: a mathematical simulation |
Type |
A1 Journal article |
| |
Year |
1998 |
Publication |
Spectrochimica acta: part B : atomic spectroscopy |
Abbreviated Journal |
Spectrochim Acta B |
| |
Volume |
53 |
Issue |
|
Pages |
437-462 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
|
| |
Address |
|
| |
Corporate Author |
|
Thesis |
|
| |
Publisher |
|
Place of Publication |
Oxford |
Editor |
|
| |
Language |
|
Wos |
000074408300006 |
Publication Date |
2002-07-26 |
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0584-8547; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
3.241 |
Times cited |
46 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 3.241; 1998 IF: 2.758 |
| |
Call Number |
UA @ lucian @ c:irua:19613 |
Serial |
449 |
| Permanent link to this record |
| |
|
| |
|
Author |
Bogaerts, A.; Verscharen, W.; Steers, E. |
| |
Title |
Computer simulations of crater profiles in glow discharge optical emission spectrometry: comparison with experiments and investigation of the underlying mechanisms |
Type |
A1 Journal article |
| |
Year |
2004 |
Publication |
Spectrochimica acta: part B : atomic spectroscopy |
Abbreviated Journal |
Spectrochim Acta B |
| |
Volume |
59 |
Issue |
|
Pages |
1403-1411 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
|
| |
Address |
|
| |
Corporate Author |
|
Thesis |
|
| |
Publisher |
|
Place of Publication |
Oxford |
Editor |
|
| |
Language |
|
Wos |
000224589900008 |
Publication Date |
2004-07-23 |
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0584-8547; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
3.241 |
Times cited |
14 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 3.241; 2004 IF: 3.086 |
| |
Call Number |
UA @ lucian @ c:irua:48103 |
Serial |
469 |
| Permanent link to this record |
| |
|
| |
|
Author |
Bleiner, D.; Bogaerts, A. |
| |
Title |
Computer simulations of sample chambers for laser ablation-inductively coupled plasma spectrometry |
Type |
A1 Journal article |
| |
Year |
2007 |
Publication |
Spectrochimica acta: part B : atomic spectroscopy |
Abbreviated Journal |
Spectrochim Acta B |
| |
Volume |
62 |
Issue |
2 |
Pages |
155-168 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
|
| |
Address |
|
| |
Corporate Author |
|
Thesis |
|
| |
Publisher |
|
Place of Publication |
Oxford |
Editor |
|
| |
Language |
|
Wos |
000246087100009 |
Publication Date |
2007-02-28 |
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0584-8547; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
3.241 |
Times cited |
|
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 3.241; 2007 IF: 2.957 |
| |
Call Number |
UA @ lucian @ c:irua:63350 |
Serial |
473 |
| Permanent link to this record |
| |
|
| |
|
Author |
Bogaerts, A.; Gijbels, R. |
| |
Title |
Description of the argon-excited levels in a radio-frequency and direct current glow discharge |
Type |
A1 Journal article |
| |
Year |
2000 |
Publication |
Spectrochimica acta: part B : atomic spectroscopy |
Abbreviated Journal |
Spectrochim Acta B |
| |
Volume |
55 |
Issue |
|
Pages |
263-278 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
|
| |
Address |
|
| |
Corporate Author |
|
Thesis |
|
| |
Publisher |
|
Place of Publication |
Oxford |
Editor |
|
| |
Language |
|
Wos |
000086340100005 |
Publication Date |
2002-07-25 |
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0584-8547; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
3.241 |
Times cited |
24 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 3.241; 2000 IF: 2.608 |
| |
Call Number |
UA @ lucian @ c:irua:28324 |
Serial |
653 |
| Permanent link to this record |
| |
|
| |
|
Author |
Autrique, D.; Bogaerts, A.; Lindner, H.; Garcia, C.C.; Niemax, K. |
| |
Title |
Design analysis of a laser ablation cell for inductively coupled plasma mass spectrometry by numerical simulation |
Type |
A1 Journal article |
| |
Year |
2008 |
Publication |
Spectrochimica acta: part B : atomic spectroscopy |
Abbreviated Journal |
Spectrochim Acta B |
| |
Volume |
63 |
Issue |
2 |
Pages |
257-270 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
|
| |
Address |
|
| |
Corporate Author |
|
Thesis |
|
| |
Publisher |
|
Place of Publication |
Oxford |
Editor |
|
| |
Language |
|
Wos |
000254038900016 |
Publication Date |
2007-12-05 |
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0584-8547; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
3.241 |
Times cited |
26 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 3.241; 2008 IF: 2.853 |
| |
Call Number |
UA @ lucian @ c:irua:67086 |
Serial |
656 |
| Permanent link to this record |
| |
|
| |
|
Author |
Bogaerts, A.; Chen, Z.; Autrique, D. |
| |
Title |
Double pulse laser ablation and laser induced breakdown spectroscopy: a modeling investigation |
Type |
A1 Journal article |
| |
Year |
2008 |
Publication |
Spectrochimica acta: part B : atomic spectroscopy |
Abbreviated Journal |
Spectrochim Acta B |
| |
Volume |
63 |
Issue |
7 |
Pages |
746-754 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
|
| |
Address |
|
| |
Corporate Author |
|
Thesis |
|
| |
Publisher |
|
Place of Publication |
Oxford |
Editor |
|
| |
Language |
|
Wos |
000258175000003 |
Publication Date |
2008-04-21 |
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0584-8547; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
3.241 |
Times cited |
56 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 3.241; 2008 IF: 2.853 |
| |
Call Number |
UA @ lucian @ c:irua:69248 |
Serial |
756 |
| Permanent link to this record |
| |
|
| |
|
Author |
Bogaerts, A.; Chen, Z. |
| |
Title |
Effect of laser parameters on laser ablation and laser-induced plasma formation: a numerical modeling investigation |
Type |
A1 Journal article |
| |
Year |
2005 |
Publication |
Spectrochimica acta: part B : atomic spectroscopy |
Abbreviated Journal |
Spectrochim Acta B |
| |
Volume |
60 |
Issue |
9/10 |
Pages |
1280-1307 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
|
| |
Address |
|
| |
Corporate Author |
|
Thesis |
|
| |
Publisher |
|
Place of Publication |
Oxford |
Editor |
|
| |
Language |
|
Wos |
000233074100003 |
Publication Date |
2005-07-28 |
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0584-8547; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
3.241 |
Times cited |
165 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 3.241; 2005 IF: 2.332 |
| |
Call Number |
UA @ lucian @ c:irua:54189 |
Serial |
820 |
| Permanent link to this record |
| |
|
| |
|
Author |
Bogaerts, A. |
| |
Title |
Effects of oxygen addition to argon glow discharges: a hybrid Monte Carlo-fluid modeling investigation |
Type |
A1 Journal article |
| |
Year |
2009 |
Publication |
Spectrochimica acta: part B : atomic spectroscopy |
Abbreviated Journal |
Spectrochim Acta B |
| |
Volume |
64 |
Issue |
11/12 |
Pages |
1266-1279 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
A hybrid model is developed for describing the effects of oxygen addition to argon glow discharges. The species taken into account in the model include Ar atoms in the ground state and the metastable level, O2 gas molecules in the ground state and two metastable levels, O atoms in the ground state and one metastable level, O3 molecules, Ar+, O+, O2+ and O− ions, as well as the electrons. The hybrid model consists of a Monte Carlo model for electrons and fluid models for the other plasma species. In total, 87 different reactions between the various plasma species are taken into account. Calculation results include the species densities and the importance of their production and loss processes, as well as the dissociation degree of oxygen. The effect of different O2 additions on these calculation results, as well as on the sputtering rates, is discussed. |
| |
Address |
|
| |
Corporate Author |
|
Thesis |
|
| |
Publisher |
|
Place of Publication |
Oxford |
Editor |
|
| |
Language |
|
Wos |
000272910300016 |
Publication Date |
2009-10-23 |
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0584-8547; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
3.241 |
Times cited |
39 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 3.241; 2009 IF: 2.719 |
| |
Call Number |
UA @ lucian @ c:irua:79271 |
Serial |
869 |
| Permanent link to this record |
| |
|
| |
|
Author |
van Straaten, M.; Bogaerts, A.; Gijbels, R. |
| |
Title |
Experimental determination of the energy distribution of ions bombarding the cathode surface in a glow discharge |
Type |
A1 Journal article |
| |
Year |
1995 |
Publication |
Spectrochimica acta: part B : atomic spectroscopy |
Abbreviated Journal |
Spectrochim Acta B |
| |
Volume |
50 |
Issue |
|
Pages |
583-605 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
|
| |
Address |
|
| |
Corporate Author |
|
Thesis |
|
| |
Publisher |
|
Place of Publication |
Oxford |
Editor |
|
| |
Language |
|
Wos |
A1995RD70500026 |
Publication Date |
2003-04-25 |
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0584-8547; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
3.176 |
Times cited |
22 |
Open Access |
|
| |
Notes |
|
Approved |
no |
| |
Call Number |
UA @ lucian @ c:irua:12269 |
Serial |
1136 |
| Permanent link to this record |
| |
|
| |
|
Author |
Bogaerts, A.; Gijbels, R. |
| |
Title |
Fundamental aspects and applications of glow discharge spectrometric techniques |
Type |
A1 Journal article |
| |
Year |
1998 |
Publication |
Spectrochimica acta: part B : atomic spectroscopy |
Abbreviated Journal |
Spectrochim Acta B |
| |
Volume |
53 |
Issue |
1 |
Pages |
1-42 |
| |
Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| |
Abstract |
|
| |
Address |
|
| |
Corporate Author |
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Thesis |
|
| |
Publisher |
|
Place of Publication |
Oxford |
Editor |
|
| |
Language |
|
Wos |
000074078200001 |
Publication Date |
2002-07-25 |
| |
Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| |
Series Volume |
|
Series Issue |
|
Edition |
|
| |
ISSN |
0584-8547; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| |
Impact Factor |
3.241 |
Times cited |
49 |
Open Access |
|
| |
Notes |
|
Approved |
Most recent IF: 3.241; 1998 IF: 2.758 |
| |
Call Number |
UA @ lucian @ c:irua:19612 |
Serial |
1308 |
| Permanent link to this record |
