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Author
Title
Year
Publication
Volume
Times cited
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Jia, W.-Z.
;
Zhang, Q.-Z.
;
Wang, X.-F.
;
Song, Y.-H.
;
Zhang, Y.-Y.
;
Wang, Y.-N.
Effect of dust particle size on the plasma characteristics in a radio frequency capacitively coupled silane plasma
2019
Journal of physics: D: applied physics
52
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