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Author
Depla, D.
;
Chen, Z.Y.
;
Bogaerts, A.
;
Ignatova, V.
;
de Gryse, R.
;
Gijbels, R.
Title
Modeling of the target surface modification by reactive ion implantation during magnetron sputtering
Type
A1 Journal article
Year
2004
Publication
Journal of vacuum science and technology: A: vacuum surfaces and films
Abbreviated Journal
J Vac Sci Technol A
Volume
22
Issue
4
Pages
1524-1529
Keywords
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author
Thesis
Publisher
Place of Publication
New York, N.Y.
Editor
Language
Wos
000223322000075
Publication Date
2004-07-27
Series Editor
Series Title
Abbreviated Series Title
Series Volume
Series Issue
Edition
ISSN
0734-2101;
ISBN
Additional Links
UA library record
;
WoS full record
;
WoS citing articles
Impact Factor
1.374
Times cited
13
Open Access
Notes
Approved
Most recent IF: 1.374; 2004 IF: 1.557
Call Number
UA @ lucian @ c:irua:47331
Serial
2137
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