“Chemical and structural analysis of etching residue layers in semiconductor devices with energy filtering transmission electron microscopy”. Hens S, van Landuyt J, Bender H, Boullart W, Vanhaelemeersch S, Materials science in semiconductor processing 4, 109 (2001). http://doi.org/10.1016/S1369-8001(00)00147-5
Abstract: The use of an energy-filtering held emission gun transmission electron microscope (CM30 FEG Ultratwin) allows, apart from imaging morphologies down to nanometer scale, the fast acquisition of high-resolution element distributions. Electrons that have lost energy corresponding to characteristic inner-shell loss edges are used to form the element maps. The production of Ultra Large-Scale Integration (ULSI) devices with dimensions below 0.25 mum requires among others the formation of a multilayer metallization scheme by means of repeatedly applying the deposition and etching of dielectrics and metals. In this work the evolution of the surface chemical species on etched Al lines in a post-etch cleaning process has been investigated by energy filtering transmission electron microscopy, with the aim to understand the role of each process step on the removal of the etching residues. (C) 2001 Elsevier Science Ltd. All rights reserved.
Keywords: A1 Journal article; Engineering sciences. Technology; Electron microscopy for materials research (EMAT)
Impact Factor: 2.359
DOI: 10.1016/S1369-8001(00)00147-5
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“The use of convergent beam electron diffraction for stress measurements in shallow trench isolation structures”. Stuer C, van Landuyt J, Bender H, Rooyackers R, Badenes G, Materials science in semiconductor processing 4, 117 (2001). http://doi.org/10.1016/S1369-8001(00)00110-4
Abstract: Shallow trench isolation (STI) is a promising technology for the isolation structures of the new generation of ULSI devices with dimensions below 0.18 mum. The various processing steps cause stress fields in STI structures, which can lead to defect formation in the silicon substrate. In their turn, stress fields affect the electrical parameters and the reliability of devices. Convergent beam electron diffraction (CBED) is used in this study to examine the influence of a wet and a dry pre-gate oxidation on the stress distribution around STI structures. The measurements are performed on STI structures with different width and spacing. CBED analysis is compared with bright-field TEM images. Defects are observed in high-strain areas of small isolated structures. (C) 2001 Elsevier Science Ltd. All rights reserved.
Keywords: A1 Journal article; Engineering sciences. Technology; Electron microscopy for materials research (EMAT)
Impact Factor: 2.359
Times cited: 6
DOI: 10.1016/S1369-8001(00)00110-4
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“The real (incommensurate interface modulated) structure of Ni6\pm xSe5”. Norén L, Van Tendeloo G, Withers RL, Journal of solid state chemistry 162, 122 (2001). http://doi.org/10.1006/jssc.2001.9365
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.299
Times cited: 4
DOI: 10.1006/jssc.2001.9365
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“Environmental monitoring in four European museums”. Camuffo D, Van Grieken R, Busse H-J, Sturaro G, Valentino A, Bernardi A, Blades N, Shooter D, Gysels K, Deutsch F, Wieser M, Kim O, Ulrych U, Atmospheric environment : an international journal 35, S127 (2001)
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
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“Density functional theory approach to artificial molecules”. Partoens B, Peeters FM, , 128 (2001)
Keywords: P1 Proceeding; Condensed Matter Theory (CMT)
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“Trions in quantum wells”. Peeters FM, Riva C, Varga K, Physica: B : condensed matter 300, 139 (2001). http://doi.org/10.1016/S0921-4526(01)00577-4
Abstract: An overview is given of our investigation of the energy levels and of the correlation functions of the negatively and positively charged excitons (also called trions) in quantum wells in the presence of a perpendicular magnetic field, A detailed comparison is made with available experimental data in III-V and II-VI semiconductor quantum wells. (C) 2001 Elsevier Science B.V. All rights reserved.
Keywords: A1 Journal article; Condensed Matter Theory (CMT)
Impact Factor: 1.386
Times cited: 31
DOI: 10.1016/S0921-4526(01)00577-4
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“Synthesis and crystal structure of Sr2ScBiO6”. Kazin PE, Abakumov AM, Zaytsev DD, Tretyakov YD, Khasanova NR, Van Tendeloo G, Jansen M, Journal of solid state chemistry 162, 142 (2001). http://doi.org/10.1006/jssc.2001.9375
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.299
Times cited: 3
DOI: 10.1006/jssc.2001.9375
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“Optimization of experimental conditions of thin-window EPMA for ligh-element analysis of individual environmental particles”. Szalóki I, Osán J, Worobiec A, de Hoog J, Van Grieken R, X-ray spectrometry 30, 143 (2001). http://doi.org/10.1002/XRS.473.ABS
Keywords: A1 Journal article; Laboratory Experimental Medicine and Pediatrics (LEMP); AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1002/XRS.473.ABS
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“Characterization of atmospheric aerosol particles over Lake Balaton, Hungary, using X-ray emission methods”. Osán J, Alföldy B, Kurunczi S, Török S, Bozó, L, Worobiec A, Injuk J, Van Grieken R, Idöjárás: quarterly journal of the Hungarian Meteorological Service 105, 145 (2001)
Keywords: A3 Journal article; Laboratory Experimental Medicine and Pediatrics (LEMP); AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
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“X-ray fluorescence”. Injuk J, Van Grieken RE page 151 (2001).
Keywords: H3 Book chapter; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
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“Synthesis and structure of fluorinated RBa2Cu2O6+. (R=Dy, Ho and Tm) phases”. Oleynikov PN, Shpanchenko RV, Rozova MG, Abakumov AM, Antipov EV, Hadermann J, Lebedev OI, Van Tendeloo G, Russian journal of inorganic chemistry 46, 153 (2001)
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 0.787
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“Analytical methods to study atmospheric pollution and weathering of materials”. Van Grieken R, Cardell C, Delalieux F, Eyckmans K page 163 (2001).
Keywords: H3 Book chapter; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
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“In situ transmission electron microscopy study of Ni silicide phases formed on (001) Si active lines”. Teodorescu V, Nistor L, Bender H, Steegen A, Lauwers A, Maex K, van Landuyt J, Journal of applied physics 90, 167 (2001). http://doi.org/10.1063/1.1378812
Abstract: The formation of Ni silicides is studied by transmission electron microscopy during in situ heating experiments of 12 nm Ni layers on blanket silicon, or in patterned structures covered with a thin chemical oxide. It is shown that the first phase formed is the NiSi2 which grows epitaxially in pyramidal crystals. The formation of NiSi occurs quite abruptly around 400 degreesC when a monosilicide layer covers the disilicide grains and the silicon in between. The NiSi phase remains stable up to 800 degreesC, at which temperature the layer finally fully transforms to NiSi2. The monosilicide grains show different epitaxial relationships with the Si substrate. Ni2Si is never observed. (C) 2001 American Institute of Physics.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.068
Times cited: 97
DOI: 10.1063/1.1378812
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“Structure and properties of (Sr,Ca)CuO2-BaCuO2 superlattices grown by pulsed laser interval deposition”. Koster G, Verbist K, Rijnders G, Rogalla H, Van Tendeloo G, Blank DHA, Physica: C : superconductivity 353, 167 (2001). http://doi.org/10.1016/S0921-4534(00)01763-9
Abstract: We report on the preparation of CuBa(2)(Sr(x)Ca(1-x))(n)Cu(n-1)O(y) compounds by fabrication of (Ba,Sr,Ca)CuO(2) superlattices with pulsed laser deposition (PLD). A technique called interval deposition is used to suppress multi-level or island growth resulting in high-quality superlattice structures. Both, the applicability of PLD to atomic engineering as well as the fabrication of artificial superconductors is demonstrated. The (Sr,Ca)CuO(2)-BaCuO(2) superlattices are characterized by X-ray diffraction, high-resolution electron microscopy (HREM) and selected area electron diffraction. The superlattice period has been deduced from electron diffraction patterns and XRD measurements. For Sr containing films, the best growth behavior is observed and films with the highest degree of crystallinity are obtained, whereas superconductivity is only found in less crystalline, Ca containing films. Under some deposition conditions and depending on the amount of Ba containing layers in the superlattice, it was observed that the BaCuO(2) material is converted to Ba(2)CuO(4-delta). Image simulations to interpret the HREM contrast are performed. (C) 2001 Elsevier Science B.V. All rights reserved.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 1.404
Times cited: 8
DOI: 10.1016/S0921-4534(00)01763-9
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“Health risk assessment of urban suspended particulate matter with special reference to polycyclic aromatic hydrocarbons: a review”. Ravindra K, Mittal AK, Van Grieken R, Reviews on environmnetal health 16, 169 (2001)
Keywords: A3 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
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“Spin-polarized tunneling through diluted magnetic semiconductor barriers”. Chang K, Peeters FM, Solid state communications 120, 181 (2001). http://doi.org/10.1016/S0038-1098(01)00370-2
Keywords: A1 Journal article; Condensed Matter Theory (CMT)
Impact Factor: 1.554
Times cited: 35
DOI: 10.1016/S0038-1098(01)00370-2
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“Catalyst traces after chemical purification in CVD grown carbon nanotubes”. Biró, LP, Khanh NQ, Horváth ZE, Vértesy Z, Kocsonya A, Konya Z, Osváth Z, Koós A, Guylai J, Zhang XB, Van Tendeloo G, Fonseca A, Nagy JB, , 183 (2001)
Keywords: P3 Proceeding; Electron microscopy for materials research (EMAT)
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“Au particles supported on (110) anatase-TiO2”. Giorgio S, Henry CR, Pauwels B, Van Tendeloo G, Microstructure And Processing 297, 197 (2001). http://doi.org/10.1016/S0921-5093(00)01261-2
Abstract: Au particles were prepared by evaporation in ultra high vacuum at high temperature, on the surfaces of TiO2 micro-spheres with the anatase structure. The morphology and the structural deformation in Au deposits were studied by high resolution transmission electron microscopy and image simulations by the multislice technique. The particles were polyhedral, limited by (100) and (111) faces. Patches with a hexagonal lattice were found around the particles, which was interpreted as thin Au islands on the surface. In these islands the Au lattice was deformed and perfectly accommodated to the (110) surface of TiO2. (C) 2001 Elsevier Science B.V. All rights reserved.
Keywords: A1 Journal article; Engineering sciences. Technology; Electron microscopy for materials research (EMAT)
Impact Factor: 3.094
Times cited: 40
DOI: 10.1016/S0921-5093(00)01261-2
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“Application of chemometric methods for classification of atmospheric particles based on thin-window electron probe microanalysis data”. Osán J, de Hoog J, Worobiec A, Ro C-U, Oh K-Y, Szalóki I, Van Grieken R, Analytica chimica acta 446, 211 (2001)
Keywords: A1 Journal article; Laboratory Experimental Medicine and Pediatrics (LEMP); AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
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“Stabilisation of fcc cobalt layers by 0.4 nm thick manganese layers in Co/Mn superlattices”. Michel A, Pierron-Bohnes V, Jay JP, Panissod P, Lefebvre S, Bessière M, Fischer HE, Van Tendeloo G, European physical journal : B : condensed matter and complex systems 19, 225 (2001). http://doi.org/10.1007/s100510170331
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 1.461
Times cited: 8
DOI: 10.1007/s100510170331
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“TEM of ultra-thin DyBa2Cu3O7-x films deposited on TiO2 terminated SrTiO3”. Bals S, Rijnders G, Blank DHA, Van Tendeloo G, Physica: C : superconductivity 355, 225 (2001). http://doi.org/10.1016/S0921-4534(01)00034-X
Abstract: Using pulsed laser deposition ultra-thin DyBa2Cu3O7-x films were deposited on a single terminated (0 0 1) SrTiOr(3) substrate. The initial growth was studied by high-resolution electron microscopy. Two different types of interface arrangements occur and were determined as: bulk-SrO-TiO2-BaO-CuO-BaO-CuO2-Dy-CuO2-BaO bulk and bulk-SrO-TiO2-BaO-CuO2-Dy-CuO2-BaO-CuO-BaO-bulk This variable growth sequence causes structural shifts, resulting in antiphase boundaries with displacement vector R = [0 0 1/3]. as well as local chemical variations. (C) 2001 Elsevier Science B.V. All rights reserved.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 1.404
Times cited: 26
DOI: 10.1016/S0921-4534(01)00034-X
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“Leaching of nutrients and trace metals from aerosol samples: a comparison between a re-circulation and an ultrasound system”. Eyckmans K, Zhang J, de Hoog J, Joos P, Van Grieken R, International journal of environmental analytical chemistry 80, 227 (2001). http://doi.org/10.1080/03067310108044372
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1080/03067310108044372
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“Modeling of a microsecond pulsed glow discharge: behavior of the argon excited levels and of the sputtered copper atoms and ions”. Bogaerts A, Gijbels R, Journal of analytical atomic spectrometry 16, 239 (2001). http://doi.org/10.1039/b009289o
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 3.379
Times cited: 36
DOI: 10.1039/b009289o
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“ID18F: a new micro-X-ray fluorescence end-station at the European Synchrotron Radiation Facility (ESRF): preliminary results”. Somogyi A, Drakopoulos M, Vincze L, Vekemans B, Camerani C, Janssens K, Snigirev A, Adams F, X-ray spectrometry 30, 242 (2001). http://doi.org/10.1002/XRS.494.ABS
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
Impact Factor: 1.298
Times cited: 76
DOI: 10.1002/XRS.494.ABS
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“Elemental composition of mineral aerosol generated from Sudan Sahara sand”. Eltayeb MAH, Injuk J, Maenhaut W, Van Grieken RE, Journal of atmospheric chemistry 40, 247 (2001). http://doi.org/10.1023/A:1012272208129
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1023/A:1012272208129
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“Transmission electron microscopy investigation of Bi-2223/Ag tapes”. Gottschalck Andersen L, Bals S, Van Tendeloo G, Poulsen HF, Liu YL, Physica: C : superconductivity 353, 251 (2001). http://doi.org/10.1016/S0921-4534(00)01755-X
Abstract: The microstructure of (Bi,Pb)2Sr2Ca2Cu3Ox (Bi-2223) tapes has been investigated by means of transmission electron microscopy (TEM) and high-resolution TEM. The emphasis has been placed on: (1) an examination of the grain morphology and size, (2) grain and colony boundary angles, which are formed during the tape processing, (3) a study of the grain boundaries on an atomic scale, including intergrowth investigations. Tapes with different process parameters have been compared with respect to the microstructure. A fully processed tape has on the average 50% thicker Bi-2223 grains than a tape after the first annealing. The angles of c-axis tilt grain boundaries are on average 14° and 26° for the fully processed tape and the tape after the first annealing, respectively. The intergrowth content (15%) and distribution are similar in these two tapes.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 1.404
Times cited: 13
DOI: 10.1016/S0921-4534(00)01755-X
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“An electron and X-ray diffraction investigation of Ni1+xTe2 and Ni1+xSe2CdI2/NiAs type solid solution phases”. Norén L, Ting V, Withers RL, Van Tendeloo G, Journal of solid state chemistry 161, 266 (2001). http://doi.org/10.1006/jssc.2001.9309
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.299
Times cited: 14
DOI: 10.1006/jssc.2001.9309
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“Does a monochromator improve the precision in quantitative HRTEM?”.den Dekker AJ, Van Aert S, van Dyck D, van den Bos A, Geuens P, Ultramicroscopy 89, 275 (2001). http://doi.org/10.1016/S0304-3991(01)00089-4
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT); Vision lab
Impact Factor: 2.843
Times cited: 22
DOI: 10.1016/S0304-3991(01)00089-4
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“Magnetic field dependence of the xciton energy in type I and type II quantum disks”. Janssens KL, Peeters FM, Schweigert VA, Partoens B, Physica: B : condensed matter 298, 277 (2001). http://doi.org/10.1016/S0921-4526(01)00316-7
Keywords: A1 Journal article; Condensed Matter Theory (CMT)
Impact Factor: 1.386
Times cited: 4
DOI: 10.1016/S0921-4526(01)00316-7
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“Two vertically coupled quantum dots in a magnetic field”. Partoens B, Peeters FM, Physica: B : condensed matter 298, 282 (2001). http://doi.org/10.1016/S0921-4526(01)00319-2
Keywords: A1 Journal article; Condensed Matter Theory (CMT)
Impact Factor: 1.386
Times cited: 8
DOI: 10.1016/S0921-4526(01)00319-2
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