Home
<<
1
>>
List View
|
Citations
|
Details
Author
Title
Year
Publication
Volume
Times cited
Additional Links
Neyts, E.
;
Yan, M.
;
Bogaerts, A.
;
Gijbels, R.
Particle-in-cell/Monte Carlo simulations of a low-pressure capacitively coupled radio-frequency discharge: effect of adding H
2
to an Ar discharge
2003
Journal of applied physics
93
15
UA library record
;
WoS full record
;
WoS citing articles
Neyts, E.
;
Yan, M.
;
Bogaerts, A.
;
Gijbels, R.
PIC-MC simulation of an RF capacitively coupled Ar/H
2
discharge
2003
Nuclear instruments and methods in physics research: B
202
8
UA library record
;
WoS full record
;
WoS citing articles