Abstract: The strategies for sampling and analysis by SEM/EDX and micro-Raman spectrometry for individual airborne particles analysis as applied at the University of Antwerp (Belgium) by the MITAC group have been reviewed. Microbeam techniques provide detailed information concerning the origin, formation, transport, reactivity, transformation reactions and environmental impact of particulate matter. Moreover, some particles of certain chemical properties have been recognized as a threat for human health and cultural heritage objects. However, the small sizes of particles result in specific problems with respect to single particle analysis. Development of equipment and software for improvement of analysis and quantification are reported.