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Author | Bogaerts, A.; Gijbels, R. | ||||
Title | Effect of small amounts of hydrogen added to argon glow discharges: hybrid Monte-Carlo-fluid model | Type | A1 Journal article | ||
Year | 2002 | Publication | Physical review : E : statistical, nonlinear, and soft matter physics | Abbreviated Journal | Phys Rev E |
Volume | 65 | Issue | Pages | 056402 | |
Keywords | A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) | ||||
Abstract | A hybrid Monte Carlofluid modeling network is developed for an argon-hydrogen mixture, to predict the effect of small amounts of hydrogen added to a dc argon glow discharge. The species considered in the model include the Ar gas atoms, electrons, Ar+ ions and fast Ar atoms, ArH+, H+, H+2 and H+3 ions, and H atoms and H2 molecules, as well as Ar metastable atoms, sputtered Cu atoms, and the corresponding Cu+ ions. Sixty-five reactions between these species are incorporated in the model. The effect of hydrogen on various calculation results is investigated, such as the species densities, the relative role of different production and loss processes for the various species, the cathode sputtering rate and contributions by different bombarding species, and the dissociation degree of H2 and the ionization degree of Ar and Cu. The calculation results are presented and discussed for 1% H2 addition, and comparison is also made with a pure argon discharge and with only 0.1% H2 addition. | ||||
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Corporate Author | Thesis | ||||
Publisher | American Institute of Physics | Place of Publication | Woodbury (NY) | Editor | |
Language | Wos | 000176552500086 | Publication Date | 2002-07-27 | |
Series Editor | Series Title | Abbreviated Series Title | |||
Series Volume | Series Issue | Edition | |||
ISSN | 1063-651X;1095-3787; | ISBN | Additional Links | UA library record; WoS full record; WoS citing articles | |
Impact Factor | 2.366 | Times cited | 33 | Open Access | |
Notes | Approved | Most recent IF: 2.366; 2002 IF: 2.397 | |||
Call Number | UA @ lucian @ c:irua:40183 | Serial | 835 | ||
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