Home
<<
1
>>
List View
|
Citations
|
Details
Author
Title
Year
Publication
Volume
Times cited
Additional Links
Tinck, S.
;
Boullart, W.
;
Bogaerts, A.
Investigation of etching and deposition processes of Cl
2
/O
2
/Ar inductively coupled plasmas on silicon by means of plasmasurface simulations and experiments
2009
Journal of physics: D: applied physics
42
23
UA library record
;
WoS full record
;
WoS citing articles