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Record
Author
Neyts, E.
;
Yan, M.
;
Bogaerts, A.
;
Gijbels, R.
Title
Particle-in-cell/Monte Carlo simulations of a low-pressure capacitively coupled radio-frequency discharge: effect of adding H
2
to an Ar discharge
Type
A1 Journal article
Year
2003
Publication
Journal of applied physics
Abbreviated Journal
J Appl Phys
Volume
93
Issue
Pages
5025-5033
Keywords
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author
Thesis
Publisher
American Institute of Physics
Place of Publication
New York, N.Y.
Editor
Language
Wos
000182296700010
Publication Date
2003-04-17
Series Editor
Series Title
Abbreviated Series Title
Series Volume
Series Issue
Edition
ISSN
0021-8979;
ISBN
Additional Links
UA library record
;
WoS full record
;
WoS citing articles
Impact Factor
2.068
Times cited
15
Open Access
Notes
Approved
Most recent IF: 2.068; 2003 IF: 2.171
Call Number
UA @ lucian @ c:irua:44012
Serial
2562
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