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Author de Witte, H.; Conard, T.; Sporken, R.; Gouttebaron, R.; Magnee, R.; Vandervorst, W.; Caudano, R.; Gijbels, R.
Title XPS study of ion induced oxidation of silicon with and without oxygen flooding Type P3 Proceeding
Year 2000 Publication Abbreviated Journal
Volume Issue Pages 73-76
Keywords P3 Proceeding; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author Thesis
Publisher Elsevier Place of Publication Amsterdam Editor
Language Wos Publication Date 0000-00-00
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN ISBN Additional Links UA library record
Impact Factor Times cited Open Access (up)
Notes Approved Most recent IF: NA
Call Number UA @ lucian @ c:irua:34079 Serial 3927
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