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Author | Fei, G.; Xue-Chun, L.; Zhao, S.-X.; You-Nian, W. | ||||
Title | Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition | Type | A1 Journal article | ||
Year | 2012 | Publication | Chinese physics B | Abbreviated Journal | Chinese Phys B |
Volume | 21 | Issue | 7 | Pages | 075203 |
Keywords | A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) | ||||
Abstract | A Langmuir probe and an ICCD are employed to study the discharge mode transition in Ar inductively coupled plasma. Electron density and plasma emission intensity are measured during the E (capacitive discharge) to H (inductive discharge) mode transitions at different pressures. It is found that plasma exists with a low electron density and a weak emission intensity in the E mode, while it has a high electron density and a strong emission intensity in the H mode. Meanwhile, the plasma emission intensity spatial (2D image) profile is symmetrical in the H mode, but the 2D image is an asymmetric profile in the E mode. Moreover, the electron density and emission intensity jump up discontinuously at high pressure, but increase almost continuously at the E to H mode transition under low pressure. | ||||
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Corporate Author | Thesis | ||||
Publisher | IOP publishing | Place of Publication | Bristol | Editor | |
Language | Wos | 000306558300058 | Publication Date | 2012-07-19 | |
Series Editor | Series Title | Abbreviated Series Title | |||
Series Volume | Series Issue | Edition | |||
ISSN | 1674-1056; | ISBN | Additional Links | UA library record; WoS full record; WoS citing articles | |
Impact Factor | 1.223 | Times cited | 11 | Open Access | |
Notes | Approved | Most recent IF: 1.223; 2012 IF: 1.148 | |||
Call Number | UA @ lucian @ c:irua:100843 | Serial | 3065 | ||
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