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Author
Bogaerts, A.
;
Naylor, J.
;
Hatcher, M.
;
Jones, W.J.
;
Mason, R.
Title
Influence of sticking coefficients on the behavior of sputtered atoms in an argon glow discharge: modeling and comparison with experiment
Type
A1 Journal article
Year
1998
Publication
Journal of vacuum science and technology: A: vacuum surfaces and films
Abbreviated Journal
J Vac Sci Technol A
Volume
16
Issue
4
Pages
2400-2410
Keywords
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author
Thesis
Publisher
Place of Publication
New York, N.Y.
Editor
Language
Wos
000074852700061
Publication Date
2002-07-27
Series Editor
Series Title
Abbreviated Series Title
Series Volume
Series Issue
Edition
ISSN
0734-2101;
ISBN
Additional Links
UA library record
;
WoS full record
;
WoS citing articles
Impact Factor
1.374
Times cited
12
Open Access
Notes
Approved
Most recent IF: 1.374; 1998 IF: 1.612
Call Number
UA @ lucian @ c:irua:24124
Serial
1634
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