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“Effect of transport of growing nanoparticles on capacitively coupled rf discharge dynamics”. Schweigert IV, Alexandrov AL, Ariskin DA, Peeters FM, Stefanović, I, Kovačević, E, Berndt J, Winter J, Physical review : E : statistical physics, plasmas, fluids, and related interdisciplinary topics 78, 026410 (2008). http://doi.org/10.1103/PhysRevE.78.026410
Abstract: We present experimental and numerical studies of the properties of a capacitively coupled 13.56 MHz discharge in a mixture of Ar and C2H2 with growing nanosize particles. It is found that at the initial stage of the growth, nanoparticles are accumulated near the sheath-plasma boundaries, where the ionization by electrons is maximal. The nanoparticles suppress the ionization due to the absorbing fast electrons and stimulate a quick change of the plasma parameters followed by a transition between different modes of discharge operation. At that moment the peaked distribution of the dust particles transforms into a flat one.
Keywords: A1 Journal article; Condensed Matter Theory (CMT)
Impact Factor: 2.366
Times cited: 36
DOI: 10.1103/PhysRevE.78.026410
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