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Title
Year
Publication
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Hens, S.
;
Bender, H.
;
Donaton, R.A.
;
Maex, K.
;
Vanhaelemeersch, S.
;
van Landuyt, J.
EFTEM study of plasma etched low-k Si-O-C dielectrics
2001
Institute of physics conference series T2 – Royal-Microscopical-Society Conference on Microscopy of Semiconducting, Materials, MAR 25-29, 2001, UNIV OXFORD, OXFORD, ENGLAND
UA library record
;
WoS full record
;