Home
<<
1
>>
List View
|
Citations
|
Details
Author
Title
Year
Publication
Volume
Times cited
Additional Links
Yan, M.
;
Bogaerts, A.
;
Goedheer, W.J.
;
Gijbels, R.
Electron energy distribution function in capacitively coupled RF discharges: differences between electropositive Ar and electronegative SiH
4
discharges
2000
Plasma sources science and technology
9
21
UA library record
;
WoS full record
;
WoS citing articles