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Author
Conard, T.
;
de Witte, H.
;
Loo, R.
;
Verheyen, P.
;
Vandervorst, W.
;
Caymax, M.
;
Gijbels, R.
Title
XPS and TOFSIMS studies of shallow Si/Si
1-x
Ge
x
/Si layers
Type
A1 Journal article
Year
1999
Publication
Thin solid films : an international journal on the science and technology of thin and thick films
Abbreviated Journal
Thin Solid Films
Volume
343/344
Issue
Pages
583-586
Keywords
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author
Thesis
Publisher
Place of Publication
Amsterdam : Elsevier
Editor
Language
Wos
000081103100149
Publication Date
2002-07-26
Series Editor
Series Title
Abbreviated Series Title
Series Volume
Series Issue
Edition
ISSN
0040-6090;
ISBN
Additional Links
UA library record
;
WoS full record
;
WoS citing articles
Impact Factor
1.879
Times cited
1
Open Access
Notes
Approved
Most recent IF: 1.879; 1999 IF: 1.101
Call Number
UA @ lucian @ c:irua:24934
Serial
3926
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