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Author
de Witte, H.
;
Vandervorst, W.
;
Gijbels, R.
Title
Modeling of bombardment induced oxidation of silicon
Type
A1 Journal article
Year
2001
Publication
Journal of applied physics
Abbreviated Journal
J Appl Phys
Volume
89
Issue
5
Pages
3001-3011
Keywords
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author
Thesis
Publisher
American Institute of Physics
Place of Publication
New York, N.Y.
Editor
Language
Wos
000167133000077
Publication Date
2002-07-26
Series Editor
Series Title
Abbreviated Series Title
Series Volume
Series Issue
Edition
ISSN
0021-8979;
ISBN
Additional Links
UA library record
;
WoS full record
;
WoS citing articles
Impact Factor
2.068
Times cited
16
Open Access
Notes
Approved
Most recent IF: 2.068; 2001 IF: 2.128
Call Number
UA @ lucian @ c:irua:37253
Serial
2119
Permanent link to this record
Author
de Witte, H.
;
Vandervorst, W.
;
Gijbels, R.
Title
Modeling of bombardment induced oxidation of silicon with and without oxygen flooding
Type
P3 Proceeding
Year
1998
Publication
Abbreviated Journal
Volume
Issue
Pages
327-330
Keywords
P3 Proceeding; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author
Thesis
Publisher
Wiley
Place of Publication
Chichester
Editor
Language
Wos
Publication Date
0000-00-00
Series Editor
Series Title
Abbreviated Series Title
Series Volume
Series Issue
Edition
ISSN
ISBN
Additional Links
UA library record
Impact Factor
Times cited
Open Access
Notes
Approved
Most recent IF: NA
Call Number
UA @ lucian @ c:irua:20470
Serial
2120
Permanent link to this record