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Author
Title
Year
Publication
Volume
Times cited
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Wen, D.-Q.
;
Zhang, Q.-Z.
;
Jiang, W.
;
Song, U.-H.
;
Bogaerts, A.
;
Wang, Y.-N.
Phase modulation in pulsed dual-frequency capacitively coupled plasmas
2014
Journal of applied physics
115
8
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