Abstract: Ibis work illustrates the development of X-ray fluorescence tomography and polycapillary based confocal imaging towards a three-dimensional (313), quantitative analytical method with lateral resolution levels down to the 2-20 mum scale. Detailed analytical characterization is given for polycapillary based confocal XRF imaging, which is a new variant of the 3D micro-XRF technique. Applications for 2D/3D micro-XR-F are illustrated for the analysis of biological (zooplankton) and geological samples (microscopic inclusions in natural diamonds and fluid inclusions in quartz). Based on confocal imaging, fully three-dimensional distributions of trace elements could be obtained, representing a significant generalization of the regular 2D scanning technique for micro-XRF spectroscopy. The experimental work described in this paper has been carried out at the ESRF ID18F microfluorescence end-station and at HASYLAB Beam Line L.