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Author Title Year (down) Publication Volume Times cited Additional Links
Gul, B.; Tinck, S.; De Schepper, P.; Aman-ur-Rehman; Bogaerts, A. Numerical investigation of HBr/He transformer coupled plasmas used for silicon etching 2015 Journal of physics: D: applied physics 48 7 UA library record; WoS full record; WoS citing articles