| Jian-Ping, N.; Xiao-Dan, L.; Cheng-Li, Z.; You-Min, Q.; Ping-Ni, H.; Bogaerts, A.; Fu-Jun, G. |
Molecular dynamics simulation of temperature effects on CF(3)(+) etching of Si surface |
2010 |
Wuli xuebao |
59 |
|
UA library record; WoS full record; WoS citing articles |
