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Title
Year
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Vanraes, P.
;
Parayil Venugopalan, S.
;
Besemer, M.
;
Bogaerts, A.
Assessing neutral transport mechanisms in aspect ratio dependent etching by means of experiments and multiscale plasma modeling
2023
Plasma Sources Science and Technology
32
UA library record
;
WoS full record
;
WoS citing articles
