NANOlab Center of Excellence literature database -- Query Results

	NANOlab Center of Excellence literature database Home \| Show All \| Simple Search \| Advanced Search	Login Quick Search: Field: contains: ...
	1–3 of 3 records found matching your query (RSS):

Select All Deselect All

<< 1 >>

List View

|

|

	Author	Title	Year	Publication	Volume	Times cited	Additional Links	Links
	Georgieva, V.; Bogaerts, A.	Negative ion behavior in single- and dual-frequency plasma etching reactors: particle-in-cell/Monte Carlo collision study	2006	Physical review : E : statistical physics, plasmas, fluids, and related interdisciplinary topics	73	7	UA library record; WoS full record; WoS citing articles
	Georgieva, V.; Bogaerts, A.	Plasma characteristics of an Ar/CF₄/N₂ discharge in an asymmetric dual frequency reactor: numerical investigation by a PIC/MC model	2006	Plasma sources science and technology	15	35	UA library record; WoS full record; WoS citing articles
	Georgieva, V.; Bogaerts, A.	Numerical simulation of dual frequency etching reactors: influence of the external process parameters on the plasma characteristics	2005	Journal of applied physics	98	75	UA library record; WoS full record; WoS citing articles

Select All Deselect All

<< 1 >>

List View

|

|

All Found Records Selected Records:

Save Citations: Format:

Export Records: Format:

CQL Search | Library Search | Show Record | Extract Citations