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| Author | Moors, K.; Sorée, B.; Magnus, W. | ||||
| Title | Resistivity scaling in metallic thin films and nanowires due to grain boundary and surface roughness scattering | Type | A1 Journal article | ||
Year  |
2017 | Publication | Microelectronic engineering | Abbreviated Journal | Microelectron Eng |
| Volume | 167 | Issue | 167 | Pages | 37-41 |
| Keywords | A1 Journal article; Engineering sciences. Technology; Condensed Matter Theory (CMT) | ||||
| Abstract | A modeling approach, based on an analytical solution of the semiclassical multi-subband Boltzmann transport equation, is presented to study resistivity scaling in metallic thin films and nanowires due to grain boundary and surface roughness scattering. While taking into account the detailed statistical properties of grains, roughness and barrier material as well as the metallic band structure and quantum mechanical aspects of scattering and confinement, the model does not rely on phenomenological fitting parameters. (C) 2016 Elsevier B.V. All rights reserved. | ||||
| Address | |||||
| Corporate Author | Thesis | ||||
| Publisher | Place of Publication | Amsterdam | Editor | ||
| Language | Wos | 000390746000008 | Publication Date | 2016-10-20 | |
| Series Editor | Series Title | Abbreviated Series Title | |||
| Series Volume | Series Issue | Edition | |||
| ISSN | 0167-9317 | ISBN | Additional Links | UA library record; WoS full record; WoS citing articles | |
| Impact Factor | 1.806 | Times cited | 6 | Open Access | |
| Notes | ; ; | Approved | Most recent IF: 1.806 | ||
| Call Number | UA @ lucian @ c:irua:140354 | Serial | 4460 | ||
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