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  Author Title Year (down) Publication Volume Times cited Additional Links Links
Liu, Y.-X.; Zhang, Y.-R.; Bogaerts, A.; Wang, Y.-N. Electromagnetic effects in high-frequency large-area capacitive discharges : a review 2015 Journal of vacuum science and technology: A: vacuum surfaces and films 33 10 UA library record; WoS full record; WoS citing articles pdf doi
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