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Author Title Year (down) Publication Volume Times cited Additional Links
Ignatova, V.A.; Möller, W.; Conard, T.; Vandervorst, W.; Gijbels, R. Interpretation of TOF-SIMS depth profiles from ultrashallow high-k dielectric stacks assisted by hybrid collisional computer simulation 2005 Applied physics A : materials science & processing 81 4 UA library record; WoS full record; WoS citing articles