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Deveirman, A.
;
van Landuyt, J.
;
Vanhellemont, J.
;
Maes, H.E.
;
Yallup, K.
Defects in high-dose oxygen implanted silicon : a TEM study
1991
Vacuum: the international journal and abstracting service for vacuum science and technology T2 – 1ST SIOMX WORKSHOP ( SEPARATION BY IMPLANTATION OF OXYGEN ) ( SWI-88 ), NOV 07-08, 1988, UNIV SURREY, GUILDFORD, ENGLAND
42
4
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