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Author
Title
Year
Publication
Volume
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Bogaerts, A.
;
Okhrimovskyy, A.
;
Baguer, N.
;
Gijbels, R.
Hollow cathode discharges with gas flow: numerical modelling for the effect on the sputtered atoms and the deposition flux
2005
Plasma sources science and technology
14
9
UA library record
;
WoS full record
;
WoS citing articles
