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| Record | |||||
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| Author | de Gendt, S.; Kenis, K.; Mertens, P.W.; Heyns, M.M.; Claes, M.; Van Grieken, R.E.; Bailleul, A.; Knotter, M.; de Bokx, P.K. | ||||
| Title | Use of grazing emission XRF spectrometry for silicon wafer surface contamination measurements | Type | P3 Proceeding | ||
Year  |
1996 | Publication | Abbreviated Journal | ||
| Volume | Issue | Pages | |||
| Keywords | P3 Proceeding; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation) | ||||
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| Corporate Author | Thesis | ||||
| Publisher | Place of Publication | Editor | |||
| Language | Wos | Publication Date | |||
| Series Editor | Series Title | Abbreviated Series Title | |||
| Series Volume | Series Issue | Edition | |||
| ISSN | ISBN | Additional Links | UA library record | ||
| Impact Factor | Times cited | Open Access | |||
| Notes | Approved | no | |||
| Call Number | UA @ admin @ c:irua:14679 | Serial | 8720 | ||
| Permanent link to this record | |||||