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Record
Author
Georgieva, V.
;
Bogaerts, A.
Title
Negative ion behavior in single- and dual-frequency plasma etching reactors: particle-in-cell/Monte Carlo collision study
Type
A1 Journal article
Year
2006
Publication
Physical review : E : statistical physics, plasmas, fluids, and related interdisciplinary topics
Abbreviated Journal
Phys Rev E
Volume
73
Issue
3
Pages
036402,1-9
Keywords
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author
Thesis
Publisher
Place of Publication
Lancaster, Pa
Editor
Language
Wos
000236467700081
Publication Date
2006-06-10
Series Editor
Series Title
Abbreviated Series Title
Series Volume
Series Issue
Edition
ISSN
1539-3755;1550-2376;
ISBN
Additional Links
UA library record
;
WoS full record
;
WoS citing articles
Impact Factor
2.366
Times cited
7
Open Access
Notes
Approved
Most recent IF: 2.366; 2006 IF: 2.438
Call Number
UA @ lucian @ c:irua:57764
Serial
2290
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