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Author Berezhnoi, S.; Kaganovich, I.; Bogaerts, A.; Gijbels, R.
Title Modelling of radio frequency capacitively coupled plasma at intermediate pressures Type H3 Book chapter
Year (down) 1999 Publication Abbreviated Journal
Volume Issue Pages 525-526
Keywords H3 Book chapter; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author Thesis
Publisher Kluwer Academic Place of Publication Dordrecht Editor
Language Wos 000081413700048 Publication Date 0000-00-00
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN ISBN Additional Links UA library record; WoS full record;
Impact Factor Times cited Open Access
Notes Approved Most recent IF: NA
Call Number UA @ lucian @ c:irua:24925 Serial 2154
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