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| Record | |||||
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| Author | de Witte, H.; Vandervorst, W.; Gijbels, R. | ||||
| Title | Modeling of bombardment induced oxidation of silicon with and without oxygen flooding | Type | P3 Proceeding | ||
Year  |
1998 | Publication | Abbreviated Journal | ||
| Volume | Issue | Pages | 327-330 | ||
| Keywords | P3 Proceeding; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) | ||||
| Abstract | |||||
| Address | |||||
| Corporate Author | Thesis | ||||
| Publisher | Wiley | Place of Publication | Chichester | Editor | |
| Language | Wos | Publication Date | 0000-00-00 | ||
| Series Editor | Series Title | Abbreviated Series Title | |||
| Series Volume | Series Issue | Edition | |||
| ISSN | ISBN | Additional Links | UA library record | ||
| Impact Factor | Times cited | Open Access | |||
| Notes | Approved | Most recent IF: NA | |||
| Call Number | UA @ lucian @ c:irua:20470 | Serial | 2120 | ||
| Permanent link to this record | |||||