Home
<<
1
>>
List View
|
Citations
|
Details
Author
Title
Year
Publication
Volume
Times cited
Additional Links
Bultinck, E.
;
Mahieu, S.
;
Depla, D.
;
Bogaerts, A.
Reactive sputter deposition of TiN
x
films, simulated with a particle-in-cell/Monte Carlo collisions model
2009
New journal of physics
11
23
UA library record
;
WoS full record
;
WoS citing articles