Home
<<
1
>>
List View
|
Citations
|
Details
Author
Title
Year
Publication
Volume
Times cited
Additional Links
de Bleecker, K.
;
Herrebout, D.
;
Bogaerts, A.
;
Gijbels, R.
;
Descamps, P.
One-dimensional modelling of a capacitively coupled rf plasma in silane/helium, including small concentrations of O
2
and N
2
2003
Journal of physics: D: applied physics
36
UA library record
;
WoS full record
;
WoS citing articles
