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| Author | Tokei, Z.; Lanckmans, F.; van den Bosch, G.; Van Hove, M.; Maex, K.; Bender, H.; Hens, S.; van Landuyt, J. | ||||
| Title | Reliability of copper dual damascene influenced by pre-clean | Type | P1 Proceeding | ||
Year  |
2002 | Publication | Analysis Of Integrated Circuits | Abbreviated Journal | |
| Volume | Issue | Pages | 118-123 | ||
| Keywords | P1 Proceeding; Electron microscopy for materials research (EMAT) | ||||
| Abstract | |||||
| Address | |||||
| Corporate Author | Thesis | ||||
| Publisher | Ieee | Place of Publication | New york | Editor | |
| Language | Wos | 000177689400022 | Publication Date | 2003-06-25 | |
| Series Editor | Series Title | Abbreviated Series Title | |||
| Series Volume | Series Issue | Edition | |||
| ISSN | ISBN | Additional Links | UA library record; WoS full record; WoS citing articles | ||
| Impact Factor | Times cited | 5 | Open Access | ||
| Notes | Conference name: | Approved | Most recent IF: NA | ||
| Call Number | UA @ lucian @ c:irua:104170 | Serial | 2865 | ||
| Permanent link to this record | |||||