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| Record | |||||
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| Author | Stuer, C.; van Landuyt, J.; Bender, H.; Rooyackers, R.; Badenes, G. | ||||
| Title | Morphology and defects in shallow trench isolation structures | Type | A1 Journal article | ||
| Year | 1999 | Publication | Conference series of the Institute of Physics | Abbreviated Journal | |
Volume  |
164 | Issue | Pages | 443-446 | |
| Keywords | A1 Journal article; Electron microscopy for materials research (EMAT) | ||||
| Abstract | |||||
| Address | |||||
| Corporate Author | Thesis | ||||
| Publisher | Place of Publication | London | Editor | ||
| Language | Wos | 000166835300094 | Publication Date | 0000-00-00 | |
| Series Editor | Series Title | Abbreviated Series Title | |||
| Series Volume | Series Issue | Edition | |||
| ISSN | 0305-2346 | ISBN | Additional Links | UA library record; WoS full record; WoS citing articles | |
| Impact Factor | Times cited | 1 | Open Access | ||
| Notes | Approved | Most recent IF: NA | |||
| Call Number | UA @ lucian @ c:irua:29690 | Serial | 2206 | ||
| Permanent link to this record | |||||