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| Author | Adelmann, C.; Wen, L.G.; Peter, A.P.; Pourtois, G.; et al. | ||||
| Title | Alternative metals for advanced interconnects | Type | P1 Proceeding | ||
| Year | 2014 | Publication | 2014 Ieee International Interconnect Technology Conference / Advanced Metallization Conference (iitc/amc) | Abbreviated Journal | |
| Volume | Issue | Pages | 173-175 | ||
| Keywords | P1 Proceeding; Engineering sciences. Technology; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) | ||||
| Abstract | We discuss the selection criteria for alternative metals in order to fulfill the requirements necessary for interconnects at half pitch values below 10 nm. The performance of scaled interconnects using transition metal germanides and CoAl alloys as metallization are studied and compared to conventional Cu and W interconnects. | ||||
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| Corporate Author | Thesis | ||||
| Publisher | Ieee | Place of Publication | New york | Editor | |
| Language | Wos | Publication Date | 0000-00-00 | ||
| Series Editor | Series Title | Abbreviated Series Title | |||
| Series Volume | Series Issue | Edition | |||
| ISSN | 978-1-4799-5018-8 | ISBN | Additional Links | UA library record; WoS full record; | |
| Impact Factor | Times cited | Open Access | |||
| Notes | Approved | Most recent IF: NA | |||
| Call Number | UA @ lucian @ c:irua:127033 | Serial | 91 | ||
| Permanent link to this record | |||||